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Year of Publication 06.12.2022
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고 종횡비 구조들의 마찰 방지 및/또는 보수를 위한 수소 플루오라이드, 알코올 및 첨가제를 포함하는 가스 혼합물
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Year of Publication 13.05.2021
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고 종횡비 구조체들의 정지 마찰 (stiction) 을 방지하고 그리고/또는 고 종횡비 구조체들을 보수하기 위한 증기 전달 헤드
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Year of Publication 05.04.2021
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RAPID AND PRECISE TEMPERATURE CONTROL FOR THERMAL ETCHING
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Year of Publication 27.04.2023
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Year of Publication 27.04.2023
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RAPID AND PRECISE TEMPERATURE CONTROL FOR THERMAL ETCHING
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Year of Publication 07.10.2021
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Year of Publication 07.10.2021
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Method and apparatus for processing wafer-shaped articles
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Year of Publication 07.12.2021
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Year of Publication 07.12.2021
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VAPOR DELIVERY HEAD FOR PREVENTING STICTION OF HIGH ASPECT RATIO STRUCTURES AND/OR REPAIRING HIGH ASPECT RATIO STRUCTURES
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Year of Publication 25.11.2021
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Year of Publication 25.11.2021
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VAPOR DELIVERY HEAD FOR PREVENTING STICTION OF HIGH ASPECT RATIO STRUCTURES AND/OR REPAIRING HIGH ASPECT RATIO STRUCTURES
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Year of Publication 27.02.2020
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Year of Publication 27.02.2020
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Method and apparatus for processing wafer-shaped articles
Baldaro, Alessandro, Gleissner, Andreas, Dylewicz, Rafal Ryszard, Fischer, Christian Thomas, Obweger, Rainer, Kumnig, Franz, Chou, Mu Hung, Lavdovsky, Nathan, Berry, III, Ivan L, Wirnsberger, Thomas
Year of Publication 26.11.2019
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Year of Publication 26.11.2019
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Vapor delivery head for preventing stiction of high aspect ratio structures and/or repairing high aspect ratio structures
BERNEY, BUTCH, HOHENWARTER, KARL-HEINZ, LAVDOVSKY, NATHAN, KLEMM, MICHAEL, BANDARAPU, BHASKAR, PUTZI, CHRISTIAN, MUI, DAVID, JOHNSON, ROBERT, SI, HONGBO, LOIDL, BERNHARD
Year of Publication 11.11.2023
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Year of Publication 11.11.2023
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Rapid and precise temperature control for thermal etching
ZHU, JI, BERNEY, BUTCH, LAVDOVSKY, NATHAN, KAWAGUCHI, MARK NAOSHI, SI, HONG-BO
Year of Publication 01.02.2022
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Year of Publication 01.02.2022
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