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Published in Industrial & engineering chemistry research (03.10.2012)
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Published in Journal of cleaner production (2007)
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Method and apparatus for a chemical sensor
LAUSH CURTIS T, WILSON BRETT GEOFFREY, HUNTER REGINALD WILLIAM, HUANG THOMAS CHI-TUNG
Year of Publication 14.10.2004
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Year of Publication 14.10.2004
Patent
Managing fluorinated byproducts of CVD chamber cleans
Vartanian, Victor, Goolsby, Brian, Mendicino, Laura, Brown, Paul Thomas
Published in Semiconductor International (01.06.2003)
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Published in Semiconductor International (01.06.2003)
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