EXTRACTION BODY FOR LITHOGRAPHIC APPARATUS
WATERSON, Nicholas Peter, RAVENSBERGEN, Simon Karel, CLOOSTERMAN, Vincentius Fransiscus, BALTIS, Coen Hubertus Matheus, HOUBEN, Martijn, KRAMER, Gijs, TROMP, Siegfried Alexander, GERRITZEN, Justin Johannes Hermanus, VAN DE VIJVER, Yuri Johannes Gabriël, ROSET, Niek Jacobus Johannes, VERMEULEN, Marcus Martinus Petrus Adrianus, LAURENT, Thibault Simon Mathieu
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Year of Publication 20.03.2019
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Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
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Year of Publication 21.02.2017
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Year of Publication 21.02.2017
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Fluid handling structure, a lithographic apparatus and a device manufacturing method
Verspaget Coen Cornelis Wilhelmus, Bloks Ruud Hendrikus Martinus Johannes, Corcoran Gregory Martin Mason, Pieterse Gerben, Gunter Pieter Lein Joseph, Thomas Ivo Adam Johannes, Van Der Ham Ronald, Laurent Thibault Simon Mathieu
Year of Publication 27.02.2018
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Year of Publication 27.02.2018
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Lithographic apparatus and method
Kunnen Johan Gertrudis Cornelis, Kaneko Takeshi, Bloks Ruud Hendrikus Martinus Johannes, Badie Ramin, Lafarre Raymond Wilhelmus Louis, Corcoran Gregory Martin Mason, Voogd Robbert Jan, Kusters Gerardus Adrianus Antonius Maria, Steffens Koen, Knarren Bastiaan Andreas Wilhelmus Hubertus, Laurent Thibault Simon Mathieu
Year of Publication 21.11.2017
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Year of Publication 21.11.2017
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Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method
Kunnen, Johan Gertrudis Cornelis, Jacobs, Johannes Henricus Wilhelmus, Verspaget, Coen Cornelis Wilhelmus, Bloks, Ruud Hendrikus Martinus Johannes, Laurent, Thibault Simon Mathieu, Houben, Martijn, Thomas, Ivo Adam Johannes, Van Der Ham, Ronald, Remie, Marinus Jan, Corcoran, Gregory Martin Mason, Pieterse, Gerben, Gunter, Pieter Lein Joseph, Derks, Sander Catharina Reinier
Year of Publication 04.10.2018
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Year of Publication 04.10.2018
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OBJECT HOLDER AND LITHOGRAPHIC APPARATUS
CORTIE, Rogier Hendrikus Magdalena, BLOKS, Ruud Hendrikus Martinus Johannes, POLET, Theodorus Wilhelmus, OVERKAMP, Jim Vincent, PIETERSE, Gerben, LAFARRE, Raymond Wilhelmus Louis, STEFFENS, Koen, LAURENT, Thibault Simon Mathieu, LEMPENS, Han Henricus Aldegonda, JACOBS, Johannes Henricus Wilhelmus, HOUBEN, Martijn, SIMONS, Wilhelmus Franciscus Johannes, TROMP, Siegfried Alexander, VY, Van Vuong
Year of Publication 20.09.2018
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Year of Publication 20.09.2018
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A LITHOGRAPHIC APPARATUS AND AN OBJECT POSITIONING SYSTEM
SAPUTRA Putra, KOEVOETS Adrianus Hendrik, BLOKS Ruud Hendrikus Martinus Johannes, BERENDSEN Christianus Wilhelmus Johannes, LAURENT Thibault Simon Mathieu, KUNNEN Johan Gertrudis Cornelis, CORTIE Rogier Hendrikus Magdalena, NEEFS Patricius Jacobus, OVERKAMP Jim Vincent, RENDERS Michael Johannes Hendrika Wilhelmina
Year of Publication 27.07.2017
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Year of Publication 27.07.2017
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LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
BLOKS Ruud Hendricus Martinus Johannes, KUSTERS Gerardus Adrianus Antonius Maria, LAURENT Thibault Simon Mathieu, PATEL Hrishikesh, FENG Peng, MIRANDA Marcio Alexandre Cano, KUNNEN Johan Gertrudis Cornelis, JACOBS Johannes Henricus Wilhelmus
Year of Publication 27.07.2017
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Year of Publication 27.07.2017
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A Measurement Substrate and a Measurement Method
KOFI AFOLABI ANTHONY MAKINWA, JOHANNES PETRUS MARTINUS BERNARDUS VERMEULEN, THIBAULT SIMON MATHIEU LAURENT, PATRICIUS JACOBUS NEEFS, RUUD HENDRIKUS MARTINUS JOHANNES BLOKS, JOHANNES PAUL MARIE DE LA ROSETTE, STOYAN NIHTIANOV
Year of Publication 02.06.2017
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Year of Publication 02.06.2017
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A MEASUREMENT SUBSTRATE AND A MEASUREMENT METHOD
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Year of Publication 01.06.2017
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Year of Publication 01.06.2017
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Sensor, lithographic apparatus and device manufacturing method
Laurent, Thibault Simon Mathieu, Teillet, Yohann Bruno Yvon, Kok, Haico Victor, Van De Rijdt, Johannes Hubertus Antonius, Kooiker, Allard Eelco, Jacobs, Johannes Henricus Wilhelmus, Knarren, Bastiaan Andreas Wilhelmus Hubertus, Van De Wal, Johannes Antonius Maria, Westerlaken, Jan Steven Christiaan, Hurkens-Mertens, Wilhelmina Margareta Jozef, Van De Vijver, Yuri Johannes Gabriël, Voogd, Robbert-Jan
Year of Publication 15.05.2018
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Year of Publication 15.05.2018
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Lithographic apparatus and method
Kunnen Johan Gertrudis Cornelis, Jacobs Johannes Henricus Wilhelmus, Nino Giovanni Francisco, Ten Kate Nicolaas, Ottens Joost Jeroen, Remie Marinus Jan, Voogd Robbert Jan, Knarren Bastiaan Andreas Wilhelmus Hubertus, Laurent Thibault Simon Mathieu
Year of Publication 25.04.2017
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Year of Publication 25.04.2017
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Lithographic apparatus and a device manufacturing method involving thermal conditioning of a table
Miranda Marcio Alexandre Cano, Kunnen Johan Gertrudis Cornelis, Jacobs Johannes Henricus Wilhelmus, Bloks Ruud Hendrikus Martinus Johannes, Patel Hrishikesh, Kusters Gerardus Adrianus Antonius Maria, Feng Peng, Laurent Thibault Simon Mathieu
Year of Publication 11.04.2017
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Year of Publication 11.04.2017
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Substrate table assembly, an immersion lithographic apparatus and a device manufacturing method
VAN BOXTEL FRANK JOHANNES JACOBUS, JACOBS JOHANNES HENRICUS WILHELMUS, LAURENT THIBAULT SIMON MATHIEU, DERKS SANDER CATHARINA REINIER, DONDERS SJOERD NICOLAAS LAMBERTUS, KUNNEN JOHAN GERTRUDIS CORNELIS, HOUBEN MARTIJN
Year of Publication 08.03.2016
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Year of Publication 08.03.2016
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LITHOGRAPHIC APPARATUS
SCHUSTER Mark Josef, WARD Christopher Charles, BLOKS Ruud Hendrikus Martinus Johannes, VERDIRAME Justin Matthew, LAURENT Thibault Simon Mathieu, WESTERLAKEN Jan Steven Christiaan, LEENDERS Martinus Hendrikus Antonius, NAYFEH Samir A, DELMASTRO Peter A, VAN BOXTEL Frank Johannes Jacobus
Year of Publication 09.03.2017
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Year of Publication 09.03.2017
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Object holder and lithographic apparatus
Jacobs Johannes Henricus Wilhelmus, Lempens Han Henricus Aldegonda, Pieterse Gerben, Tromp Siegfried Alexander, Steffens Koen, Houben Martijn, Polet Theodorus Wilhelmus, Bloks Ruud Hendrikus Martinus Johannes, Lafarre Raymond Wilhelmus Louis, Simons Wilhelmus Franciscus Johannes, Cortie Rogier Hendrikus Magdalena, Vy Van Vuong, Overkamp Jim Vincent, Laurent Thibault Simon Mathieu
Year of Publication 13.03.2018
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Year of Publication 13.03.2018
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Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method
Jacobs Johannes Henricus Wilhelmus, Derks Sander Catharina Reinier, Corcoran Gregory Martin Mason, Pieterse Gerben, Gunter Pieter Lein Joseph, Van Der Ham Ronald, Houben Martijn, Kunnen Johan Gertrudis Cornelis, Verspaget Coen Cornelis Wilhelmus, Bloks Ruud Hendrikus Martinus Johannes, Remie Marinus Jan, Thomas Ivo Adam Johannes, Laurent Thibault Simon Mathieu
Year of Publication 20.02.2018
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Year of Publication 20.02.2018
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Lithographic apparatus
Leenders Martinus Hendrikus Antonius, Van Boxtel Frank Johannes Jacobus, Delmastro Peter A, Westerlaken Jan Steven Christiaan, Bloks Ruud Hendrikus Martinus Johannes, Nayfeh Samir A, Schuster Mark Josef, Ward Christopher Charles, Verdirame Justin Matthew, Laurent Thibault Simon Mathieu
Year of Publication 06.12.2016
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Year of Publication 06.12.2016
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SENSOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
VAN DE WAL Johannes Antonius Maria, VAN DE RIJDT Johannes Hubertus Antonius, KNARREN Bastiaan Andreas Wilhelmus Hubertus, VAN DE VIJVER Yuri Johannes Gabriël, LAURENT Thibault Simon Mathieu, TEILLET Yohann Bruno Yvon, WESTERLAKEN Jan Steven Christiaan, JACOBS Johannes Henricus Wilhelmus, KOK Haico Victor, KOOIKER Allard Eelco, VOOGD Robbert-Jan, HURKENS-MERTENS Wilhelmina Margareta Jozef
Year of Publication 21.12.2017
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Year of Publication 21.12.2017
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