Copper Direct-Bonding Characterization and Its Interests for 3D Integration
Gueguen, Pierric, Di Cioccio, Léa, Gergaud, Patrice, Rivoire, Maurice, Scevola, Daniel, Zussy, Marc, Charvet, Anne Marie, Bally, Laurent, Lafond, Dominique, Clavelier, Laurent
Published in Journal of the Electrochemical Society (2009)
Published in Journal of the Electrochemical Society (2009)
Get full text
Journal Article
Physics of direct bonding: Applications to 3D heterogeneous or monolithic integration
Gueguen, Pierric, Ventosa, Caroline, Cioccio, Léa Di, Moriceau, Hubert, Grossi, François, Rivoire, Maurice, Leduc, Patrick, Clavelier, Laurent
Published in Microelectronic engineering (01.03.2010)
Published in Microelectronic engineering (01.03.2010)
Get full text
Journal Article
Conference Proceeding
Germanium-on-insulator (GeOI) substrates—A novel engineered substrate for future high performance devices
Akatsu, Takeshi, Deguet, Chrystel, Sanchez, Loic, Allibert, Frédéric, Rouchon, Denis, Signamarcheix, Thomas, Richtarch, Claire, Boussagol, Alice, Loup, Virginie, Mazen, Frédéric, Hartmann, Jean-Michel, Campidelli, Yves, Clavelier, Laurent, Letertre, Fabrice, Kernevez, Nelly, Mazure, Carlos
Published in Materials science in semiconductor processing (01.08.2006)
Published in Materials science in semiconductor processing (01.08.2006)
Get full text
Journal Article
Conference Proceeding
Enhancement of photoluminescence from germanium by utilizing air-bridge-type photonic crystal slab
Nakayama, Shigeru, Iwamoto, Satoshi, Ishida, Satomi, Bordel, Damian, Augendre, Emmanuel, Clavelier, Laurent, Arakawa, Yasuhiko
Published in Physica. E, Low-dimensional systems & nanostructures (01.09.2010)
Published in Physica. E, Low-dimensional systems & nanostructures (01.09.2010)
Get full text
Journal Article
Conference Proceeding
Growth of InAs/GaAs quantum dots on germanium-on-insulator-on-silicon substrate for silicon photonics
Bordel, Damien, Rajesh, Mohan, Nishioka, Masao, Augendre, Emmanuel, Clavelier, Laurent, Guimard, Denis, Arakawa, Yasuhiko
Published in Physica. E, Low-dimensional systems & nanostructures (01.09.2010)
Published in Physica. E, Low-dimensional systems & nanostructures (01.09.2010)
Get full text
Journal Article
Conference Proceeding
Enabling 3D Monolithic Integration
Batude, Perrine, Vinet, Maud, Pouydebasque, Arnaud, Clavelier, Laurent, LeRoyer, Cyrille, Tabone, Claude, Previtali, Bernard, Sanchez, Loic, Baud, Laurence, Roman, Antonio, Carron, Véronique, Nemouchi, Fabrice, Pocas, Stéphane, Comboroure, Corine, Mazzocchi, Vincent, Grampeix, Helen, Aussenac, François, Deleonibus, Simon
Published in ECS transactions (03.10.2008)
Published in ECS transactions (03.10.2008)
Get full text
Journal Article
Low-Temperature Measurements on Germanium-on-Insulator pMOSFETs: Evaluation of the Background Doping Level and Modeling of the Threshold Voltage Temperature Dependence
Van Den Daele, William, Augendre, Emmanuel, Romanjek, Krunoslav, Le Royer, Cyrille, Clavelier, Laurent, Damlencourt, Jean-Francois, Guiot, Eric, Ghyselen, Bruno, Cristoloveanu, S.
Published in ECS transactions (15.05.2009)
Published in ECS transactions (15.05.2009)
Get full text
Journal Article
Review of Some Critical Aspects of Ge and GeOI Substrates
Clavelier, Laurent, Le Royer, Cyrille, Morand, Yves, Deguet, Chrystel, Vincent, B., Damlencourt, Jean-François, Hartmann, Jean-Michel, Kermarrec, O., Signamarcheix, T., Depuydt, B., Theuwis, Antoon, Quaeyhaegens, C., Cherkashin, N., Rivallin, P., Tabone, Claude, Lagrasta, S., Campidelli, Y., Descombes, S., Sanchez, L., Akastu, T., Rigny, A., Bensahel, D., Billon, Thierry, Kernevez, Nelly, Deleonibus, Simon
Published in ECS transactions (20.10.2006)
Published in ECS transactions (20.10.2006)
Get full text
Journal Article
Epitaxial Regrowth of Ge on SGOI and GeOI Substrates Obtained by Ge Condensation
Damlencourt, Jean-Francois, Campidelli, Yves, Roure, Marie-Christine, Vincent, Benjamin, Martinez, Eugenie, Fillot, Frederic, Arrazat, Brice, Nguyen, Tuan, Cristoloveanu, S., Clavelier, Laurent, Morand, Yves
Published in ECS transactions (27.04.2007)
Published in ECS transactions (27.04.2007)
Get full text
Journal Article
Copper Direct Bonding Characterization and its Interests for 3D Integration Circuits
Gueguen, Pierric, Di Cioccio, Léa, Gergaud, Patrice, Rivoire, Maurice, Scevola, Daniel, Zussy, Marc, Charvet, Anne Marie, Bally, Laurent, Lafond, Dominique, Clavelier, Laurent
Published in ECS transactions (03.10.2008)
Published in ECS transactions (03.10.2008)
Get full text
Journal Article
Growth of InAs/GaAs quantum dots on Si, Ge/Si and germanium-on-insulator-on-silicon (GeOI) substrates emitting in the 1.3 μm band for silicon photonics
Rajesh, Mohan, Bordel, Damien, Kawaguchi, Kenichi, Faure, Stephane, Nishioka, Masao, Augendre, Emmanuel, Clavelier, Laurent, Guimard, Denis, Arakawa, Yasuhiko
Published in Journal of crystal growth (15.01.2011)
Published in Journal of crystal growth (15.01.2011)
Get full text
Journal Article
Conference Proceeding
Growth of InAs/GaAs quantum dots on Si, Ge/Si and germanium-on-insulator-on-silicon (GeOI) substrates emitting in the 1.3 [micro]m band for silicon photonics
Rajesh, Mohan, Bordel, Damien, Kawaguchi, Kenichi, Faure, Stephane, Nishioka, Masao, Augendre, Emmanuel, Clavelier, Laurent, Guimard, Denis, Arakawa, Yasuhiko
Published in Journal of crystal growth (15.01.2011)
Published in Journal of crystal growth (15.01.2011)
Get full text
Journal Article
Static and Dynamic TCAD Analysis of IMOS Performance: From the Single Device to the Circuit
Mayer, F., Le Royer, C., Le Carval, G., Clavelier, L., Deleonibus, S.
Published in IEEE transactions on electron devices (01.08.2006)
Published in IEEE transactions on electron devices (01.08.2006)
Get full text
Journal Article
Effect of Antimony on the Photoluminescence Intensity of InAs Quantum Dots Grown on Germanium-on-Insulator-on-Silicon Substrate
Rajesh, Mohan, Faure, Stephane, Nishioka, Masao, Augendre, Emmanuel, Clavelier, Laurent, Guimard, Denis, Arakawa, Yasuhiko
Published in Applied physics express (01.04.2011)
Published in Applied physics express (01.04.2011)
Get full text
Journal Article
Epitaxial Growth of Ge Thick Layers on Nominal and 6oC off Si(001); Ge Surface Passivation by Si
Hartmann, Jean-Michel, Grampeix, Helen, Clavelier, Laurent
Published in ECS transactions (03.10.2008)
Published in ECS transactions (03.10.2008)
Get full text
Journal Article
Activation level in boron-doped thin germanium-on-insulator (GeOI): Extraction method and impact of mobility
Hutin, Louis, Koffel, Stéphane, Le Royer, Cyrille, Clavelier, Laurent, Scheiblin, Pascal, Mazzocchi, Vincent, Deleonibus, Simon
Published in Materials science in semiconductor processing (01.10.2008)
Published in Materials science in semiconductor processing (01.10.2008)
Get full text
Journal Article
Conference Proceeding
(Invited) An Overview of Patterned Metal/Dielectric Surface Bonding: Mechanism, Alignment and Characterization
Di Cioccio, Lea, Gueguen, P., Taibi, R., Landru, Didier, Gaudin, G., Chappaz, C., Rieutord, François, De Crecy, F., Radu, Ionut, Chapelon, L., Clavelier, Laurent
Published in ECS transactions (01.01.2010)
Published in ECS transactions (01.01.2010)
Get full text
Journal Article
LiNbO 3 Single Crystal Layer Transfer Techniques for High Performances RF Filters
Deguet, Chrystel, Pijolat, Mathieu, Blanc, Nicolas, Imbert, Bruno, Loubriat, Sebastien, Defay, Emmanuel, Ricart, Thibault, Clavelier, Laurent, Moulet, Jean Sebastien, Ghyselen, Bruno, Letertre, Fabrice, Ballandras, Sylvain
Published in ECS transactions (01.10.2010)
Published in ECS transactions (01.10.2010)
Get full text
Journal Article
Single Crystal Silicon Film Transfer onto Polymer
Argoud, Maxime, Moriceau, Hubert, Fretigny, Christian, Rieutord, François, Morales, Christophe, Clavelier, Laurent
Published in ECS transactions (01.01.2010)
Published in ECS transactions (01.01.2010)
Get full text
Journal Article