Design of Protective Topcoats for Immersion Lithography
Allen, Robert D., Brock, Phillip J., Sundberg, Linda, Larson, Carl E., Wallraff, Gregory M., Hinsberg, William D., Meute, Jeff, Shimokawa, Tsutomu, Chiba, Takashi, Slezak, Mark
Published in Journal of Photopolymer Science and Technology (01.01.2005)
Published in Journal of Photopolymer Science and Technology (01.01.2005)
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Journal Article
The Influence of Collaboration on Program Outcomes: The Colorado Nurse—Family Partnership
Hicks, Darrin, Larson, Carl, Nelson, Christopher, Olds, David L., Johnston, Erik
Published in Evaluation review (01.10.2008)
Published in Evaluation review (01.10.2008)
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Journal Article
The Influence of Photoacid Structure on the Design and Performance of 193-nm Resists
Allen, Robert D., Opitz, Juliann, Larson, Carl E., Wallow, Thomas I., DiPietro, Richard A., Breyta, Gregory, Sooriyakumaran, Ratnam, Hofer, Donald C.
Published in Journal of Photopolymer Science and Technology (1997)
Published in Journal of Photopolymer Science and Technology (1997)
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Journal Article
Platform-Dependent Properties of 193nm Single Layer Resists
Allen, Robert D., Wallow, Thomas I., Opitz, Juliann, Larson, Carl, DiPietro, Richard A., Sooriyakumaran, Ratnam, Brock, Philip, Breyta, Greg, Hofer, Donald C., Jayaraman, Saikumar, Vicari, Richard, Hullihen, Karen A., Rhodes, Larry F., Goodall, Brian L., Shick, Robert A.
Published in Journal of Photopolymer Science and Technology (1998)
Published in Journal of Photopolymer Science and Technology (1998)
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Journal Article
The Influence of Photoacid Structure on the Design and Performance of 1 93-nm Resists
Allen, Robert D., Opitz, Juliann, Larson, Carl E., Wallow, Thomas I., DiPietro, Richard A., Breyta, Gregory, Sooriyakumaran, Ratnam, Hofer, Donald C.
Published in Journal of photopolymer science and technology (1997)
Published in Journal of photopolymer science and technology (1997)
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Journal Article
Generator injection tool
Larson, Carl R, Barca, Anthony, Ramsey, Lucas, Merrill, Bryce, Evans, Eric, Hall, Michael A
Year of Publication 09.04.2024
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Year of Publication 09.04.2024
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