Internal stress and elastic modulus measurements on micromachined 3C-SiC thin films
Mehregany, M., Lijun Tong, Matus, L.G., Larkin, D.J.
Published in IEEE transactions on electron devices (01.01.1997)
Published in IEEE transactions on electron devices (01.01.1997)
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Journal Article
High voltage 6H-SiC rectifiers: prospects and progress
Neudeck, P.G., Larkin, D.J., Powell, J.A., Matus, L.G.
Published in 51st Annual Device Research Conference (1993)
Published in 51st Annual Device Research Conference (1993)
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Conference Proceeding
High voltage 6H-SiC rectifiers: prospects and progress
Neudeck, P.G., Larkin, D.J., Powell, J.A., Matus, L.G.
Published in IEEE transactions on electron devices (01.11.1993)
Published in IEEE transactions on electron devices (01.11.1993)
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Journal Article
Greatly improved 3C-SiC p-n junction diodes grown by chemical vapor deposition
Neudeck, P.G., Larkin, D.J., Starr, J.E., Powell, J.A., Salupo, C.S., Matus, L.G.
Published in IEEE electron device letters (01.03.1993)
Published in IEEE electron device letters (01.03.1993)
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Journal Article