Confined selective lateral epitaxial growth of 16-nm thick Ge nanostructures on SOI substrates: Advantages and challenges
Khazaka, Rami, Bogumilowicz, Yann, Rouchon, Denis, Boutry, Hervé, Chalupa, Zdenek, Lapras, Valérie, Prévitali, Bernard, Chevalier, Nicolas, Papon, Anne Marie, David, Sylvain, Maitrejean, Sylvain
Published in Applied surface science (01.07.2018)
Published in Applied surface science (01.07.2018)
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Journal Article
Very Low Temperature Tensile and Selective Si:P Epitaxy for Advanced CMOS Devices
Kanyandekwe, Joël, Bauer, Matthias, Marion, Tanguy, Saidi, Lazhar, Pin, Jean-Baptiste, Bisserier, Jeremie, Richy, Jérôme, Gauthier, Nicolas, Dezest, Pattamon, Brunet, Laurent, Lapras, Valérie, Dewolf, Tristan, Thomas, Shawn, Hartmann, Jean-Michel
Published in ECS transactions (30.09.2022)
Published in ECS transactions (30.09.2022)
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Journal Article
Methodology for Active Junction Profile Extraction in thin film FD-SOI Enabling performance driver identification in 500°C devices for 3D sequential integration
Frutuoso, T. Mota, Garros, X., Batude, P., Brunet, L., Lacord, J., Sklenard, B., Lapras, V., Fenouillet-Beranger, C., Ribotta, M., Magalhaes-Lucas, A., Kanyandekwe, J., Kies, R., Romano, G., Catapano, E., Casse, M., Lugo-Alvarez, J., Ferrari, P., Gaillard, F.
Published in 2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) (12.06.2022)
Published in 2022 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) (12.06.2022)
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Conference Proceeding
Very Low Temperature Tensile and Selective Si:P Epitaxy for Advanced CMOS Devices
Kanyandekwe, Joël, Bauer, Matthias, Marion, Tanguy, Saidi, Lazhar, Pin, Jean-Baptiste, Bisserier, Jeremie, Richy, Jérôme, Gauthier, Nicolas, Dezest, Pattamon, Brunet, Laurent, Lapras, Valérie, Dewolf, Tristan, Thomas, Shawn, Hartmann, Jean-Michel
Published in Meeting abstracts (Electrochemical Society) (09.10.2022)
Published in Meeting abstracts (Electrochemical Society) (09.10.2022)
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Journal Article
Via first approach optimisation for Through Silicon Via applications
Laviron, C., Dunne, B., Lapras, V., Galbiati, P., Henry, D., Toia, F., Moreau, S., Anciant, R., Brunet-Manquat, C., Sillon, N.
Published in 2009 59th Electronic Components and Technology Conference (01.05.2009)
Published in 2009 59th Electronic Components and Technology Conference (01.05.2009)
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Conference Proceeding