Nickel silicide for interconnects
Lin, Kevin L., Bojarski, Stephanie A., Carver, Colin T., Chandhok, Manish, Chawla, Jasmeet S., Clarke, James S., Harmes, Michael, Krist, Brian, Lang, Hazel, Mayeh, Mona, Naskar, Sudipto, Plombon, John J., Seung Hoon Sung, Hui Jae Yoo
Published in 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) (01.05.2015)
Published in 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) (01.05.2015)
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Conference Proceeding
Demonstration of a sidewall capacitor to evaluate dielectrics and metal barrier thin films
Lin, Kevin L., Carver, Colin T., Chebiam, Ramanan, Clarke, James, Faber, Jacob, Harmes, Michael, Indukuri, Tejaswi, Jezewski, Christopher, Kobrinsky, Mauro, Krist, Brian, Lakamraju, Narendra, Lang, Hazel, Myers, Alan M., Plombon, John J., Singh, Kanwal Jit, Hui Jae Yoo
Published in IEEE International Interconnect Technology Conference (01.05.2014)
Published in IEEE International Interconnect Technology Conference (01.05.2014)
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Conference Proceeding
Demonstration of new planar capacitor (PCAP) vehicles to evaluate dielectrics and metal barrier thin films
Lin, Kevin L., Bielefeld, Jeffrey, Chawla, Jasmeet S., Carver, Colin T., Chebiam, Ramanan, Clarke, James S., Faber, Jacob, Harmes, Michael, Indukuri, Tejaswi, Jezewski, Christopher, Kasim, Rahim, Kobrinsky, Mauro, Kabir, Nafees A., Krist, Brian, Lakamraju, Narendra, Lang, Hazel, Mays, Ebony, Myers, Alan M., Plombon, John J., Singh, Kanwal Jit, Torres, Jessica, Yoo, Hui Jae
Published in 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) (01.05.2015)
Published in 2015 IEEE International Interconnect Technology Conference and 2015 IEEE Materials for Advanced Metallization Conference (IITC/MAM) (01.05.2015)
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Conference Proceeding
Book reviews
Harris, Stuart, Crouch, Harold, Kerkvliet, Ben, Polomka, Peter, Case, William, Tomaras, Effi Juli, Morris-Suzuki, Tessa, Goodman, David S.G., Cotton, James, Hewison, Kevin, Duncan, Ron, Burnett, Alan, Nourzhanov, Kirill, Miller, Robert F., Kuhn, Rick, Bell, Coral, Siracusa, Joseph M., Lang, Hazel, Suter, Keith
Published in Australian Journal of International Affairs (01.05.1995)
Published in Australian Journal of International Affairs (01.05.1995)
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Book Review
Book reviews
Harris, Stuart, Crouch, Harold, Kerkvliet, Ben, Polomka, Peter, Case, William, Tomaras, Effi Juli, Morris‐Suzuki, Tessa, Goodman, David S.G., Cotton, James, Hewison, Kevin, Duncan, Ron, Burnett, Alan, Nourzhanov, Kirill, Miller, Robert F., Kuhn, Rick, Bell, Coral, Siracusa, Joseph M., Lang, Hazel, Suter, Keith
Published in Australian Journal of International Affairs (01.05.1995)
Published in Australian Journal of International Affairs (01.05.1995)
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Book Review