Directed Self-Assembly and Pattern Transfer of Five Nanometer Block Copolymer Lamellae
Lane, Austin P, Yang, XiaoMin, Maher, Michael J, Blachut, Gregory, Asano, Yusuke, Someya, Yasunobu, Mallavarapu, Akhila, Sirard, Stephen M, Ellison, Christopher J, Willson, C. Grant
Published in ACS nano (22.08.2017)
Published in ACS nano (22.08.2017)
Get full text
Journal Article
Photopatterning of Block Copolymer Thin Films
Lane, Austin P, Maher, Michael J, Willson, C. Grant, Ellison, Christopher J
Published in ACS macro letters (19.04.2016)
Published in ACS macro letters (19.04.2016)
Get full text
Journal Article
Pattern Transfer of Sub-10 nm Features via Tin-Containing Block Copolymers
Maher, Michael J, Mori, Kazunori, Sirard, Stephen M, Dinhobl, Andrew M, Bates, Christopher M, Gurer, Emir, Blachut, Gregory, Lane, Austin P, Durand, William J, Carlson, Matthew C, Strahan, Jeffrey R, Ellison, Christopher J, Willson, C. Grant
Published in ACS macro letters (15.03.2016)
Published in ACS macro letters (15.03.2016)
Get full text
Journal Article
Synthesis and Characterization of Si-containing Block Co-polymers with Resolution beyond 10 nm
Someya, Yasunobu, Asano, Yusuke, Maher, Michael J, Blachut, Gregory, Lane, Austin P, Sirard, Stephen, Ellison, Christopher J, C. Grant Willson
Published in Journal of photopolymer science and technology (2016)
Published in Journal of photopolymer science and technology (2016)
Get full text
Journal Article
Block Copolymers for DSA in the 100 Å Regime
Willson, C. Grant, Blachut, Gregory, Maher, Michael J., Durand, William J., Bates, Christopher M., Carlson, Matthew C., Self, Jeffrey L., Lane, Austin P., Asano, Yusuke, Sirard, Stephen, Hayes, Colin O., Ellison, Christopher J.
Published in Journal of Photopolymer Science and Technology (13.09.2014)
Published in Journal of Photopolymer Science and Technology (13.09.2014)
Get full text
Journal Article
A Hybrid Chemo-/Grapho-Epitaxial Alignment Strategy for Defect Reduction in Sub-10 nm Directed Self-Assembly of Silicon-Containing Block Copolymers
Blachut, Gregory, Sirard, Stephen M, Maher, Michael J, Asano, Yusuke, Someya, Yasunobu, Lane, Austin P, Durand, William J, Bates, Christopher M, Dinhobl, Andrew M, Gronheid, Roel, Hymes, Diane, Ellison, Christopher J, Willson, C. Grant
Published in Chemistry of materials (27.12.2016)
Published in Chemistry of materials (27.12.2016)
Get full text
Journal Article
Design of high‐χ block copolymers for lithography
Durand, William J, Blachut, Gregory, Maher, Michael J, Sirard, Stephen, Tein, Summer, Carlson, Matthew C, Asano, Yusuke, Zhou, Sunshine X, Lane, Austin P, Bates, Christopher M, Ellison, Christopher J, Willson, C. Grant
Published in Journal of polymer science. Part A, Polymer chemistry (15.01.2015)
Published in Journal of polymer science. Part A, Polymer chemistry (15.01.2015)
Get more information
Journal Article
Photopatternable Interfaces for Block Copolymer Lithography
Maher, Michael J, Bates, Christopher M, Blachut, Gregory, Carlson, Matthew C, Self, Jeffrey L, Janes, Dustin W, Durand, William J, Lane, Austin P, Ellison, Christopher J, Willson, C. Grant
Published in ACS macro letters (19.08.2014)
Published in ACS macro letters (19.08.2014)
Get full text
Journal Article
High-χ, Si-Containing Block Copolymers and Process Strategies for Directing Their Self-Assembly
Ellison, Christopher J., Willson, C. Grant, Janes, Dustin, Blachut, Gregory, Soymeya, Yasunobu, Delgadillo, Paulina A. Rincon, Vandenberghe, Geert, Singh, Arjun, Doise, Jan, Ito, Natsuko, Mizuochi, Ryuta, Asano, Yusuke, Lane, Austin P.
Published in Journal of Photopolymer Science and Technology (01.01.2017)
Published in Journal of Photopolymer Science and Technology (01.01.2017)
Get full text
Journal Article
Synthesis and Characterization of Si-containing Block Co-polymers with Resolution beyond 10 nm
Someya, Yasunobu, Asano, Yusuke, Maher, Michael J., Blachut, Gregory, Lane, Austin P., Sirard, Stephen, Ellison, Christopher J., Willson, C. Grant
Published in Journal of Photopolymer Science and Technology (01.01.2016)
Published in Journal of Photopolymer Science and Technology (01.01.2016)
Get full text
Journal Article
Block Copolymers for DSA in the 100 ^|^Aring; Regime
Willson, C. Grant, Blachut, Gregory, Maher, Michael J., Durand, William J., Bates, Christopher M., Carlson, Matthew C., Self, Jeffrey L., Lane, Austin P., Asano, Yusuke, Sirard, Stephen, Hayes, Colin O., Ellison, Christopher J.
Published in Journal of photopolymer science and technology (2014)
Published in Journal of photopolymer science and technology (2014)
Get full text
Journal Article
Block Copolymers for DSA in the 100 Aa Regime
Grant Willson, C, Blachut, Gregory, J Maher, Michael, J Durand, William, M Bates, Christopher, C Carlson, Matthew, L Self, Jeffrey, P Lane, Austin, Asano, Yusuke, Sirard, Stephen
Published in Journal of photopolymer science and technology (01.01.2014)
Get full text
Published in Journal of photopolymer science and technology (01.01.2014)
Journal Article
Sidewall guided directed self assembly data storage medium
Yang, Xiaomin, Xiao, ShuaiGang, Lane, Austin P, Kuo, David S, Lee, Kim Yang
Year of Publication 07.01.2020
Get full text
Year of Publication 07.01.2020
Patent
Sidewall Guided Directed Self Assembly Data Storage Medium
Yang, Xiaomin, Xiao, ShuaiGang, Lane, Austin P, Kuo, David S, Lee, Kim Yang
Year of Publication 11.10.2018
Get full text
Year of Publication 11.10.2018
Patent