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"Lam, Hieu A"
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"Lam, Hieu A"
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Method of monitoring a processing system
by
LAM
,
Hieu
,
A
,
YUE, Hongyu
Year of Publication
07.06.2017
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Method and apparatus for determining an etch property using an endpoint signal
by
YUE HONGYU
,
LAM HIEU A
Year of Publication
01.11.2011
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Method and apparatus for determining an etch property using an endpoint signal
by
Yue, Hongyu
,
Lam
,
Hieu A
Year of Publication
01.11.2011
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A PROCESS SYSTEM HEALTH INDEX AND METHOD OF USING THE SAME
by
YUE, HONGYU
,
LAM
,
HIEU
,
A
Year of Publication
09.03.2011
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Process system health index and method of using the same
by
YUE HONGYU
,
LAM HIEU A
Year of Publication
11.05.2010
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Process system health index and method of using the same
by
Yue, Hongyu
,
Lam
,
Hieu A
Year of Publication
11.05.2010
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METHOD AND SYSTEM FOR CONTROLLING PROCESS BY USING MATERIAL PROCESS-TOOL AND PERFORMANCE DATA
by
YUE HONGYU
,
LAM HIEU A
Year of Publication
22.04.2010
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Method and apparatus for using a pressure control system to monitor a plasma processing system
by
YUE HONGYU
,
LAM HIEU A
Year of Publication
30.09.2008
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Method and apparatus for using a pressure control system to monitor a plasma processing system
by
Yue, Hongyu
,
Lam
,
Hieu A
Year of Publication
30.09.2008
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Method and system for predicting process performance using material processing tool and sensor data
by
Lam
,
Hieu A
,
Yue, Hongyu
,
Shriner, John
Year of Publication
30.11.2010
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Method and system for predicting process performance using material processing tool and sensor data
by
YUE HONGYU
,
SHRINER JOHN
,
LAM HIEU A
Year of Publication
30.11.2010
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Method and system of discriminating substrate type
by
Lam
,
Hieu A
,
Yue, Hongyu
Year of Publication
01.05.2007
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Method and system of discriminating substrate type
by
YUE HONGYU
,
LAM HIEU A
Year of Publication
01.05.2007
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METHOD OF DOUBLE PATTERNING USING SACRIFICIAL STRUCTURE
by
NIINO REIJI
,
YUE HONGYU
,
LAM HIEU A
Year of Publication
17.12.2009
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Controlling a material processing tool and performance data
by
Lam
,
Hieu A
,
Yue, Hongyu
Year of Publication
23.01.2007
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Controlling a material processing tool and performance data
by
YUE HONGYU
,
LAM HIEU A
Year of Publication
23.01.2007
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A process system health index and method of using the same
by
LAM
,
HIEU A
,
YUE, HONGYU
Year of Publication
11.10.2006
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Process system health index and method of using the same
by
YUE HONGYU,
LAM HIEU A
Year of Publication
16.08.2006
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METHOD AND SYSTEM FOR PREDICTING PROCESS PERFORMANCE USING MATERIAL PROCESSING TOOL AND SENSOR DATA
by
YUE HONGYU
,
SHRINER JOHN
,
LAM HIEU A
Year of Publication
16.04.2009
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Method of monitoring a processing system
by
YUE, HONGYU
,
LAM
,
HIEU
,
A
Year of Publication
29.03.2006
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