DIRECTED SELF-ASSEMBLY OF BLOCK COPOLYMERS USING SEGMENTED PREPATTERNS
LAI, KAFAI, CHENG, JOY, LI, WAI-KIN, NA, YOUNG-HYE, SANDERS, DANIEL, PAUL, RETTNER, CHARLES, THOMAS
Year of Publication 12.05.2011
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Year of Publication 12.05.2011
Patent
CALCULATING IMAGE INTENSITY OF MASK BY DECOMPOSING MANHATTAN POLYGON BASED ON PARALLEL EDGE
LAI KAFAI, TIAN KEHAN, MELVILLE DAVID O. S, ROSENBLUTH ALAN E, TIRAPU-AZPIROZ JAIONE
Year of Publication 23.07.2009
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Year of Publication 23.07.2009
Patent
DIRECTED SELF-ASSEMBLY OF BLOCK COPOLYMERS USING SEGMENTED PREPATTERNS
LAI, KAFAI, CHENG, JOY, LI, WAI-KIN, NA, YOUNG-HYE, SANDERS, DANIEL, PAUL, RETTNER, CHARLES, THOMAS
Year of Publication 25.11.2010
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Year of Publication 25.11.2010
Patent
Directed self-assembly of block copolymers using segmented prepatterns
LAI KAFAI, LI WAI-KIN, NA YOUNG-HYE, RETTNER CHARLES, SANDERS DANIEL P, CHENG JOY
Year of Publication 25.11.2010
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Year of Publication 25.11.2010
Patent
Simultaneous computation of multiple points on one or multiple cut lines
Gallatin, Gregg M, Gofman, Emanuel, Lai, Kafai, Lavin, Mark A, Mukherjee, Maharaj, Ramm, Dov, Rosenbluth, Alan E, Shlafman, Shlomo
Year of Publication 23.11.2010
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Year of Publication 23.11.2010
Patent
Simultaneous computation of multiple points on one or multiple cut lines
LAI KAFAI, GOFMAN EMANUEL, RAMM DOV, SHLAFMAN SHLOMO, ROSENBLUTH ALAN E, MUKHERJEE MAHARAJ, LAVIN MARK A, GALLATIN GREGG M
Year of Publication 23.11.2010
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Year of Publication 23.11.2010
Patent
Method of forming sub-lithographic features using directed self-assembly of polymers
LAI KAFAI, LI WAI-KIN, YANG DA, NA YOUNG-HYE, RETTNER CHARLES, SANDERS DANIEL P, CHENG JOY
Year of Publication 14.02.2012
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Year of Publication 14.02.2012
Patent
Performance in model-based OPC engine utilizing efficient polygon pinning method
LAI KAFAI, GOFMAN EMANUEL, RAMM DOV, SHLAFMAN SHLOMO, ROSENBLUTH ALAN E, MUKHERJEE MAHARAJ, LAVIN MARK A, GALLATIN GREGG M
Year of Publication 10.08.2010
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Year of Publication 10.08.2010
Patent
Performance in model-based OPC engine utilizing efficient polygon pinning method
Gallatin, Gregg M, Gofman, Emanuel, Lai, Kafai, Lavin, Mark A, Mukherjee, Maharaj, Ramm, Dov, Rosenbluth, Alan E, Shlafman, Shlomo
Year of Publication 10.08.2010
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Year of Publication 10.08.2010
Patent
Performance in model-based OPC engine utilizing efficient polygon pinning method
Gallatin, Gregg M, Gofman, Emanuel, Lai, Kafai, Lavin, Mark A, Mukherjee, Maharaj, Ramm, Dov, Rosenbluth, Alan E, Shlafman, Shlomo
Year of Publication 20.07.2010
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Year of Publication 20.07.2010
Patent
Performance in model-based OPC engine utilizing efficient polygon pinning method
LAI KAFAI, GOFMAN EMANUEL, RAMM DOV, SHLAFMAN SHLOMO, ROSENBLUTH ALAN E, MUKHERJEE MAHARAJ, LAVIN MARK A, GALLATIN GREGG M
Year of Publication 20.07.2010
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Year of Publication 20.07.2010
Patent
PHOTOLITHOGRAPHY FOCUS IMPROVEMENT BY REDUCTION OF AUTOFOCUS RADIATION TRANSMISSION INTO SUBSTRATE
LAI KAFAI, LI WAI-KIN, HUANG WU-SONG, BURNS SEAN D, BRUNNER TIMOTHY A, LIEGL BERNHARD R, CHEN KUANG-JUNG
Year of Publication 20.10.2011
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Year of Publication 20.10.2011
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