Method to match exposure tools using a programmable illuminator
LAI KAFAI, AZPIROZ JAIONE TIRAPU, MELVILLE DAVID O, TIAN KEHAN, BAGHERI SAEED, ROSENBLUTH ALAN E
Year of Publication 08.01.2013
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Year of Publication 08.01.2013
Patent
Fast method to model photoresist images using focus blur and resist blur
Brunner, Timothy A, Gallatin, Gregg M, Gordon, Ronald L, Lai, Kafai, Rosenbluth, Alan E, Seong, Nakgeuon
Year of Publication 07.08.2012
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Year of Publication 07.08.2012
Patent
Fast method to model photoresist images using focus blur and resist blur
LAI KAFAI, GORDON RONALD L, BRUNNER TIMOTHY A, SEONG NAKGEUON, ROSENBLUTH ALAN E, GALLATIN GREGG M
Year of Publication 07.08.2012
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Year of Publication 07.08.2012
Patent
PRINTABILITY VERIFICATION BY PROGRESSIVE MODELING ACCURACY
LAI, KAFAI, MUKHERJEE, MAHARAJ, GALLATIN, GREGG M, ROSENBLUTH, ALAN E
Year of Publication 09.12.2009
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Year of Publication 09.12.2009
Patent
Analyzing a patterning process using a model of yield
LAI KAFAI, MELVILLE DAVID OSMOND, SINGH RAMA N, TIAN KEHAN, JOSHI RAJIV VASANT, BAGHERI SAEED, ROSENBLUTH ALAN E, MUKHOPADHYAY SAIBAL, HENG FOOK-LUEN
Year of Publication 04.11.2014
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Year of Publication 04.11.2014
Patent
Method for designing optical lithography masks for directed self-assembly
LAI KAFAI, LI WAI-KIN, RETTNER CHARLES THOMAS, SANDERS DANIEL PAUL, YANG DA, NA YOUNG-HYE, PITERA JED WALTER, CHENG JOY
Year of Publication 07.10.2014
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Year of Publication 07.10.2014
Patent
Fast and accurate method to simulate intermediate range flare effects
Mukherjee, Maharaj, Culp, James A, Mansfield, Scott M, Lai, Kafai, Rosenbluth, Alan E
Year of Publication 17.04.2012
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Year of Publication 17.04.2012
Patent
Fast and accurate method to simulate intermediate range flare effects
LAI KAFAI, MANSFIELD SCOTT M, CULP JAMES A, ROSENBLUTH ALAN E, MUKHERJEE MAHARAJ
Year of Publication 17.04.2012
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Year of Publication 17.04.2012
Patent