Directed self-assembly of block copolymers using segmented prepatterns
LAI KAFAI, LI WAI-KIN, RETTNER CHARLES THOMAS, SANDERS DANIEL PAUL, NA YOUNG-HYE, CHENG JOY
Year of Publication 15.04.2015
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Year of Publication 15.04.2015
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Fin design level mask decomposition for directed self assembly
LAI KAFAI, DECHENE DANIEL J, GUILLORN MICHAEL A, PITERA JED W, TSAI HSINYU
Year of Publication 18.02.2014
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Year of Publication 18.02.2014
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AUSDRUCKBARKEITSVERIFIKATION DURCH SCHRITTWEISE MODELLIERUNGSGENAUIGKEIT
LAI, KAFAI, MUKHERJEE, MAHARAJ, GALLATIN, GREGG M, ROSENBLUTH, ALAN E
Year of Publication 15.08.2011
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Year of Publication 15.08.2011
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PRINTABILITY VERIFICATION BY PROGRESSIVE MODELING ACCURACY
LAI, KAFAI, MUKHERJEE, MAHARAJ, GALLATIN, GREGG M, ROSENBLUTH, ALAN E
Year of Publication 03.08.2011
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Year of Publication 03.08.2011
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Constrained optimization of lithographic source intensities under contingent requirements
LAI KAFAI, TIAN KEHAN, MELVILLE DAVID O. S, BAGHERI SAEED, ROSENBLUTH ALAN E
Year of Publication 10.12.2013
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Year of Publication 10.12.2013
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Method for optimizing source and mask to control line width roughness and image log slope
LAI KAFAI, MELVILLE DAVID O, AZPIROZ JAIONE TIRAPU, TIAN KEHAN, BAGHERI SAEED, ROSENBLUTH ALAN E
Year of Publication 12.02.2013
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Year of Publication 12.02.2013
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Method to match exposure tools using a programmable illuminator
Azpiroz, Jaione Tirapu, Bagheri, Saeed, Lai, Kafai, Melville, David O, Rosenbluth, Alan E, Tian, Kehan
Year of Publication 08.01.2013
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Year of Publication 08.01.2013
Patent