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Year of Publication 22.09.2004
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Formation of composite tungsten films
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Year of Publication 20.10.2009
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Year of Publication 20.10.2009
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Formation of composite tungsten films
Lai, Ken K, Byun, Jeong Soo, Wu, Frederick C, Srinivas, Ramanujapuran A, Gelatos, Avgerinos, Chang, Mei, Kori, Moris, Sinha, Ashok K, Chung, Hua, Fang, Hongbin, Mak, Alfred W, Yang, Michael X, Xi, Ming
Year of Publication 20.10.2009
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Year of Publication 20.10.2009
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Formation of composite tungsten films
SRINIVAS, RAMANUJAPURAM A, GELATOS, AVGERINOS, BYUN, JEONG SOO, LAI, KEN K, WU, FREDERICK C
Year of Publication 01.04.2004
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Year of Publication 01.04.2004
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METHOD FOR DEPOSITING TUNGSTEN-CONTAINING LAYERS BY VAPOR DEPOSITION TECHNIQUES
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Year of Publication 20.09.2007
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Year of Publication 20.09.2007
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PROCESS FOR TUNGSTEN DEPOSITION BY PULSED GAS FLOW CVD
CHEN, CHILIANG, LU, XINLIANG, KAO, CHIEN-TEH, LAI, KEN, K, YOO, JONG, HYUN
Year of Publication 07.08.2003
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Year of Publication 07.08.2003
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FORMATION OF COMPOSITE TUNGSTEN FILMS
MAK ALFRED W, FANG HONGBIN, GELATOS AVGERINOS, CHANG MEI, KORI MORIS, YANG MICHAEL X, XI MING, CHUNG HUA, WU FREDERICK C, SINHA ASHOK K, LAI KEN K, BYUN JEONG SOO, SRINIVAS RAMANUJAPURAN A
Year of Publication 18.09.2008
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Year of Publication 18.09.2008
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METHOD FOR DEPOSITING TUNGSTEN-CONTAINING LAYERS BY VAPOR DEPOSITION TECHNIQUES
MAK ALFRED W, KORI MORIS, LITTAU KARL A, LAI KEN K, LU XINLIANG, XI MING, SINHA ASHOK
Year of Publication 23.11.2006
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Year of Publication 23.11.2006
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ATOMIC LAYER DEPOSITION APPARATUS
CHIN BARRY L, MAK ALFRED W, BYUN JEONG S, LEI LAWRENCE C, CHUNG HUA, LAI KEN K, XI MING
Year of Publication 05.10.2006
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Year of Publication 05.10.2006
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Formation of composite tungsten films
MAK ALFRED W, FANG HONGBIN, GELATOS AVGERINOS, CHANG MEI, KORI MORIS, YANG MICHAEL X, XI MING, CHUNG HUA, WU FREDERICK C, SINHA ASHOK K, LAI KEN K, BYUN JEONG SOO, SRINIVAS RAMANUJAPURAN A
Year of Publication 10.06.2008
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Year of Publication 10.06.2008
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Formation of composite tungsten films
Lai, Ken K, Byun, Jeong Soo, Wu, Frederick C, Srinivas, Ramanujapuran A, Gelatos, Avgerinos, Chang, Mei, Kori, Moris, Sinha, Ashok K, Chung, Hua, Fang, Hongbin, Mak, Alfred W, Yang, Michael X, Xi, Ming
Year of Publication 10.06.2008
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Year of Publication 10.06.2008
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Apparatus and method for aligning and controlling edge deposition on a substrate
GHANAYEM STEVE, TSAI KENNETH, YUDOVSKY JOSEPH, LAI KEN K, MAHAJANI MAITREYEE, LIU PATRICIA, NAKAGAWA TOSHIYUKI
Year of Publication 11.12.2001
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Year of Publication 11.12.2001
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Apparatus and method for aligning and controlling edge deposition on a substrate
GHANAYEM STEVE, TSAI KENNETH, YUDOVSKY JOSEPH, LAI KEN K, MAHAJANI MAITREYEE, LIU PATRICIA, NAKAGAWA TOSHIYUKI
Year of Publication 13.02.2001
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Year of Publication 13.02.2001
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Formation of titanium nitride films using a cyclical deposition process
MAK ALFRED W, FANG HONGBIN, CHUNG HUA, KORI MORIS, YANG MICHAEL X, LAI KEN K, BYUN JEONG SOO, JIAN PING, LU XINLIANG, XI MING
Year of Publication 22.01.2004
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Year of Publication 22.01.2004
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Methods for depositing tungsten layers employing atomic layer deposition techniques
BYUN JEONG S, FANG HONGBIN, YANG MICHAEL X, GELATOS AYGERINOS V, KNEPFLER CHERYL, XI MING, RAJAGOPALAN RAVI, HUANG CHAO-MING, CHUNG HUA, CASTRO JOSEPH, GANDIKOTA SRINIVAS, LAI KEN K, KHANDELWAL AMIT, MOORTHY MADHU, JIAN PING
Year of Publication 12.01.2006
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Year of Publication 12.01.2006
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