DEVICE FOR HANDLING WAFER-SHAPED OBJECTS IN A HANDLING PLANE OF A LOCAL CLEAN ROOM
SCHULTZ, KLAUS, HEITMANN, MICHAEL, GAGLIN, AXEL, SCHELER, WERNER, LAHNE, BERNDT
Year of Publication 01.12.1998
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Year of Publication 01.12.1998
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Device for the detection of substrates stacked with a specific spacing
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Year of Publication 19.09.2006
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Year of Publication 19.09.2006
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Device for the detection of substrates stacked with a specific spacing
Gilchrist, Ulysses, Barriss, Louise S, Raue, Hagen, Lahne, Berndt, Heinze, Manfred, König, Joachim, Schultz, Klaus
Year of Publication 19.09.2006
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Year of Publication 19.09.2006
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Device for the detection of substrates stacked with a specific spacing
SCHULTZ KLAUS, BARRISS LOUISE S, KONIG JOACHIM, GILCHRIST ULYSSES, LAHNE BERNDT, HEINZE MANFRED, RAUE HAGEN
Year of Publication 30.09.2004
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Year of Publication 30.09.2004
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Device for the detection of substrates stacked with a specific spacing
Barriss, Louise, Gilchrist, Ulysses, Raue, Hagen, Lahne, Berndt, Heinze, Manfred, Konig, Joachim, Schultz, Klaus
Year of Publication 30.09.2004
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Year of Publication 30.09.2004
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EINRICHTUNG ZUM HANDELN VON SCHEIBENFÖRMIGEN OBJEKTEN IN EINER HANDLINGEBENE EINES LOKALEN REINRAUMES
SCHULTZ, KLAUS, HEITMANN, MICHAEL, GAGLIN, AXEL, SCHELER, WERNER, LAHNE, BERNDT
Year of Publication 15.06.1998
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Year of Publication 15.06.1998
Patent
DEVICE FOR HANDLING WAFER-SHAPED OBJECTS IN A HANDLING PLANE OF A LOCAL CLEAN ROOM
SCHULTZ, KLAUS, HEITMANN, MICHAEL, GAGLIN, AXEL, SCHELER, WERNER, LAHNE, BERNDT
Year of Publication 03.06.1998
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Year of Publication 03.06.1998
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