Search Results - "Lafontaine, Bruno" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Evaluation of High and Low Activation Resists for EUV Lithography

Evaluation of High and Low Activation Resists for EUV Lithography

by Thackeray, James W., Nassar, Roger A., Spear-Alfonso, Kathleen, Wallow, Tom, LaFontaine, Bruno
Published in Journal of Photopolymer Science and Technology (01.01.2006)

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Journal Article

TRANSPORT SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE

TRANSPORT SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE

by ERSHOV ALEXANDER I, LAFONTAINE BRUNO, VERHOFF BRANDON W, WILSON GREGORY J, DE DEA SILVIA
Year of Publication 16.05.2016

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Patent

High power fiber laser driver for efficient EUV lithography source with tin-doped water droplet targets

High power fiber laser driver for efficient EUV lithography source with tin-doped water droplet targets

by Hou, Kai-Chung, George, Simi, Mordovanakis, Aghapi G, Takenoshita, Kazutoshi, Nees, John, Lafontaine, Bruno, Richardson, Martin, Galvanauskas, Almantas
Published in Optics express (21.01.2008)

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Journal Article

Demonstration of fiber-laser-produced plasma source and application to efficient extreme UV light generation

Demonstration of fiber-laser-produced plasma source and application to efficient extreme UV light generation

by Mordovanakis, Aghapi G, Hou, Kai-Chung, Chang, Yu-Chung, Cheng, Ming-Yuan, Nees, John, Hou, Bixue, Maksimchuk, Anatoly, Mourou, Gerard, Galvanauskas, Almantas, Lafontaine, Bruno
Published in Optics letters (01.09.2006)

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Journal Article

Method for determining suitability of a resist in semiconductor wafer fabrication

Method for determining suitability of a resist in semiconductor wafer fabrication

by WALLOW THOMAS, LAFONTAINE BRUNO M
Year of Publication 28.12.2010

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Patent

Method for determining suitability of a resist in semiconductor wafer fabrication

Method for determining suitability of a resist in semiconductor wafer fabrication

by Wallow, Thomas, LaFontaine, Bruno M
Year of Publication 28.12.2010

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Patent

Method for determining suitability of a resist in semiconductor wafer fabrication

Method for determining suitability of a resist in semiconductor wafer fabrication

by WALLOW THOMAS, LAFONTAINE BRUNO M
Year of Publication 08.01.2009

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Patent

Lithography method and system with adjustable reflector

Lithography method and system with adjustable reflector

by LAFONTAINE BRUNO M
Year of Publication 20.12.2005

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Patent

Lithography method and system with adjustable reflector

Lithography method and system with adjustable reflector

by LaFontaine, Bruno M
Year of Publication 20.12.2005

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Patent

TRANSPORT SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE

TRANSPORT SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE

by WILSON, GREGORY, J, VERHOFF, BRANDON, W, ERSHOV, ALEXANDER, I, LAFONTAINE, BRUNO, DE DEA, SILVIA
Year of Publication 12.03.2015

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Patent

Laser beam formatting module and method for fabricating semiconductor dies using same

Laser beam formatting module and method for fabricating semiconductor dies using same

by WOOD, II OBERT REEVES, LAFONTAINE BRUNO M
Year of Publication 12.06.2012

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Patent

Laser beam formatting module and method for fabricating semiconductor dies using same

Laser beam formatting module and method for fabricating semiconductor dies using same

by LaFontaine, Bruno M, Wood, II, Obert Reeves
Year of Publication 12.06.2012

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Patent

Optical polarizer with nanotube array

Optical polarizer with nanotube array

by OKOROANYANWU UZODINMA, LEVINSON HARRY J, LAFONTAINE BRUNO M, KIM RYOUNG-HAN
Year of Publication 29.07.2014

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Patent

Detection of contamination in imaging systems by fluorescence and/or absorption spectroscopy

Detection of contamination in imaging systems by fluorescence and/or absorption spectroscopy

by LALOVIC IVAN, LAFONTAINE BRUNO M
Year of Publication 08.08.2006

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Patent

Detection of contamination in imaging systems by fluorescence and/or absorption spectroscopy

Detection of contamination in imaging systems by fluorescence and/or absorption spectroscopy

by Lalovic, Ivan, LaFontaine, Bruno M
Year of Publication 08.08.2006

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Patent

Method and device for determining reflection lens pupil transmission distribution and illumination intensity distribution in reflective imaging system

Method and device for determining reflection lens pupil transmission distribution and illumination intensity distribution in reflective imaging system

by LALOVIC IVAN, LAFONTAINE BRUNO M
Year of Publication 25.07.2006

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Patent

Method and device for determining reflection lens pupil transmission distribution and illumination intensity distribution in reflective imaging system

Method and device for determining reflection lens pupil transmission distribution and illumination intensity distribution in reflective imaging system

by Lalovic, Ivan, LaFontaine, Bruno M
Year of Publication 25.07.2006

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Patent

Methods for enhancing resolution of a chemically amplified photoresist

Methods for enhancing resolution of a chemically amplified photoresist

by LaFontaine, Bruno, Pawloski, Adam R, Wallow, Thomas
Year of Publication 17.03.2009

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Patent

Methods for enhancing resolution of a chemically amplified photoresist

Methods for enhancing resolution of a chemically amplified photoresist

by WALLOW THOMAS, LAFONTAINE BRUNO, PAWLOSKI ADAM R
Year of Publication 17.03.2009

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Patent

Method and system for monitoring EUV lithography mask flatness

Method and system for monitoring EUV lithography mask flatness

by LaFontaine, Bruno M, Lavolic, Ivan
Year of Publication 27.09.2005

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Patent