Fabrication of sharp silicon hollow microneedles by deep-reactive ion etching towards minimally invasive diagnostics
Li, Yan, Zhang, Hang, Yang, Ruifeng, Laffitte, Yohan, Schmill, Ulises, Hu, Wenhan, Kaddoura, Moufeed, Blondeel, Eric J. M., Cui, Bo
Published in Microsystems & nanoengineering (26.08.2019)
Published in Microsystems & nanoengineering (26.08.2019)
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