Use of organosilicate resins as hardmasks for organic polymer dielectrics in fabrication of microelectronic devices
Mills, Lynne K, Waeterloos, Joost J. M, Wilson, Larry R, Shaffer, Edward O. II, Townsend, Paul H. III, Gombar-Fetner, Sheila, Hetzner, Jack E, Howard, Kevin E
Year of Publication 24.05.2017
Get full text
Year of Publication 24.05.2017
Patent
TRI-LAYER MASKING ARCHITECTURE FOR PATTERNING DUAL DAMASCENE INTERCONNECTS
TOWNSEND, PAUL, H., III, MILLS, LYNNE, K, STRITTMATTER, RICHARD, J, WAETERLOOS, JOOST, J., M
Year of Publication 23.01.2013
Get full text
Year of Publication 23.01.2013
Patent
SPIN-ON-DIELECTRIC COMPOSITION WITH COATING ENHANCER
FOSTER KENNETH L, MILLS LYNNE K, STRAND DEIDRE A, ROSE GENE D, DOMINOWSKI JOLEE M, HAHN STEPHEN F
Year of Publication 28.02.2013
Get full text
Year of Publication 28.02.2013
Patent
An article having multilayer dielectric stack
LYNNE K. MILLS, PAUL H- TOWNSEND, JOOST J. M. WAETERLOOS, RICHARD J. STRITTMATTER
Year of Publication 21.12.2010
Get full text
Year of Publication 21.12.2010
Patent
Spin-on-dielectric compositions with coating enhancer
STRAND, DEIDRE A, ROSE, GENE D, MILLS, LYNNE K, FOSTER, KENNETH L, DOMINOWSKI, JOLEE M
Year of Publication 01.04.2007
Get full text
Year of Publication 01.04.2007
Patent
Tri-layer masking architecture for patterning dual damascene interconnects
WAETERLOOS JOOST J. M, TOWNSEND PAUL H. III, MILLS LYNNE K, STRITTMATTER RICHARD J
Year of Publication 27.07.2005
Get full text
Year of Publication 27.07.2005
Patent