Bilayer HDP CVD/PE CVD cap in advanced BEOL interconnect structures and method thereof
CHEN, TZEIANG, LUSTIG, NAFTALI E, KANE, TERENCE, ENGEL, BRETT H, FITZSIMMONS, JOHN A
Year of Publication 21.12.2005
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Year of Publication 21.12.2005
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INTERCONNECT STRUCTURE AND PROCESS OF MAKING THE SAME
SANKARAN, SUJATHA, STANDAERT, THEODORUS, E, DAVIS, PEGEEN, M, FITZSIMMONS, JOHN, A, NICHOLSON, LEE, M, LUSTIG, NAFTALI, E, GRECO, STEPHEN, E, KO, TZE-MAN
Year of Publication 26.06.2008
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Year of Publication 26.06.2008
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Gestapelte Durchkontaktstruktur für Metallsicherungsanwendungen
CHANDA, KAUSHIK, BONILLA, GRISELDA, WANG, PINGUAN, LUSTIG, NAFTALI E, GRUNOW, STEPHAN, FILIPPI, RONALD G, SIMON, ANDREW H
Year of Publication 24.12.2013
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Year of Publication 24.12.2013
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Stacked via structure for metal fuse applications
FILIPPI RONALD G, SIMON ANDREW H, WANG PINGCHUAN, LUSTIG NAFTALI E, BONILLA GRISELDA, GRUNOW STEPHAN, CHANDA KAUSHIK
Year of Publication 18.12.2013
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Year of Publication 18.12.2013
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INTERCONNECT STRUCTURE AND PROCESS OF MAKING THE SAME
SANKARAN, SUJATHA, STANDAERT, THEODORUS, E, DAVIS, PEGEEN, M, FITZSIMMONS, JOHN, A, NICHOLSON, LEE, M, LUSTIG, NAFTALI, E, GRECO, STEPHEN, E, KO, TZE-MAN
Year of Publication 07.02.2008
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Year of Publication 07.02.2008
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ELEKTRISCH PROGRAMMIERBARE BACK-END-SICHERUNG
BONILLA, GRISELDA, CHANDA, KAUSHIK, LUSTIG, NAFTALI E, GRUNOW, STEPHAN, MOY, DAN, CHOI, SAMUEL S, FILIPPI, RONALD G, SIMON, ANDREW H, BAO, JUNJING
Year of Publication 02.10.2014
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Year of Publication 02.10.2014
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BACK-END ELECTRICALLY PROGRAMMABLE FUSE
FILIPPI RONALD G, SIMON ANDREW H, CHOI SAMUEL S, BAO JUNJING, LUSTIG NAFTALI E, MOY DAN, BONILLA GRISELDA, GRUNOW STEPHAN, CHANDA KAUSHIK
Year of Publication 10.09.2014
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Year of Publication 10.09.2014
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BILAYER HDP CVD / PE CVD CAP IN ADVANCED BEOL INTERCONNECT STRUCTURES AND METHOD THEREOF
VINCENT MCGAHAY, YUN YU WANG, ERDEM KALTALIOGLU, SOONON SEO, TERENCE KANE, BRETT H. ENGEL, ANN MCDONALD, ANTHONY K. STAMPER, JOHN A. FITZSIMMONS, NAFTALI E. LUSTIG, TZEIANG CHEN
Year of Publication 31.12.2007
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Year of Publication 31.12.2007
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Integration scheme for advanced BEOL metallization including low-k cap layer and method thereof
AGARWALA BIRENDRA N, FITZSIMMONS JOHN A, LEE JIA, LUSTIG NAFTALI E, WANG YUN YU, GATES STEPHEN
Year of Publication 17.07.2003
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Year of Publication 17.07.2003
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Interconnect structure and process of making the same
STANDAERT THEODORUS E, KO TZE-MAN, GRECO STEPHEN E, SANKARAN SUJATHA, NICHOLSON LEE M, FITZSIMMONS JOHN A, DAVIS PEGEEN M, LUSTIG NAFTALI E
Year of Publication 13.06.2012
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Year of Publication 13.06.2012
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BILAYER HDP CVD / PE CVD CAP IN ADVANCED BEOL INTERCONNECT STRUCTURES AND METHOD THEREOF
CHEN, TZEIANG, ENGEL, BRETT, H, SEO, SOONON, FITZSIMMONS, JOHN, A, KANE, TERENCE, WANG, YUN, YU, LUSTIG, NAFTALI, E, STAMPER, ANTHONY, K, KALTALIOGLU, ERDEM, MCDONALD, ANN, MCGAHAY, VINCENT
Year of Publication 20.07.2005
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Year of Publication 20.07.2005
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Elimination of photo-induced electrochemical dissolution in chemical mechanical polishing
POPE; KEITH R, LUSTIG; NAFTALI E, EDELSTEIN; DANIEL C, HORKANS; WILMA J, LUCE; STEPHEN E, ROPER; PETER D
Year of Publication 28.11.2000
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Year of Publication 28.11.2000
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