ROTATING DISK REACTOR WITH FERROFLUID SEAL FOR CHEMICAL VAPOR DEPOSITION
LUSE TODD A, GURARY ALEXANDER I, POLLOCK JOHN D, BARRISS LOUISE S, FREMGEN ROGER P, COMUNALE RICHARD A, MILGATE III ROBERT WHITE
Year of Publication 02.03.2016
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Year of Publication 02.03.2016
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Rotating disk reactor with ferrofluid seal for chemical vapor deposition
Luse, Todd A, Comunale, Richard A, Milgate, Robert White, Fremgen, Roger P, Barriss, Louise S, Pollock, John D, Gurary, Alexander I
Year of Publication 21.07.2020
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Year of Publication 21.07.2020
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Multi-wafer rotating disc reactor with inertial planetary drive
SCANDARIATO JOSEPH, LUSE TODD A, CELARU ADRIAN, PARANJPE AJIT P, TANG QINGFU
Year of Publication 05.01.2016
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Year of Publication 05.01.2016
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Rotating Disk Reactor With Ferrofluid Seal For Chemical Vapor Deposition
Comunale Richard A, Luse Todd A, Milgate Robert White, Barriss Louise S, Gurary Alexander I, Fremgen Roger P, Pollock John D
Year of Publication 06.04.2017
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Year of Publication 06.04.2017
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Rotating Disk Reactor With Ferrofluid Seal For Chemical Vapor Deposition
LUSE TODD A, GURARY ALEXANDER I, POLLOCK JOHN D, MILGATE, III ROBERT WHITE, BARRISS LOUISE S, FREMGEN ROGER P, COMUNALE RICHARD A
Year of Publication 19.03.2015
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Year of Publication 19.03.2015
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Rotating disk reactor with ferrofluid seal for chemical vapor deposition
LUSE TODD A, GURARY ALEXANDER I, POLLOCK JOHN D, BARRISS LOUISE S, FREMGEN ROGER P, COMUNALE RICHARD A, MILGATE III ROBERT WHITE
Year of Publication 21.01.2015
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Year of Publication 21.01.2015
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MULTI-WAFER ROTATING DISC REACTOR WITH INERTIAL PLANETARY DRIVE
SCANDARIATO JOSEPH, LUSE TODD A, TANG QUINFU, CELARU ADRIAN, PARANJPE AJIT P
Year of Publication 08.12.2011
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Year of Publication 08.12.2011
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