Search Results - "LUKANC TODD" :: K.UTB vyhledávací portál

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METHOD OF ENHANCING CLEAR FIELD PHASE SHIFT MASKS BY ADDING PARALLEL LINE TO PHASE 0 REGION

by SPENCE, CHRISTOPHER, A, LUKANC, TODD, P
Year of Publication 21.05.2008

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Conductive material adhesion enhancement in damascene process for semiconductors

by LUKANC; TODD P
Year of Publication 22.08.2000

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Method of enhancing clear field phase shift masks with border regions around phase 0 and phase 180 regions

by LUKANC, TODD P, SPENCE, CHRISTOPHER A
Year of Publication 21.05.2007

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Method and apparatus for determining an etch endpoint

by ADEM ERCAN, LUKANC TODD P
Year of Publication 04.11.2003

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Method and apparatus for determining an etch endpoint

by Lukanc, Todd P, Adem, Ercan
Year of Publication 04.11.2003

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Method of enhancing clear field phase shift masks with border regions around phase 0 and phase 180 regions

by LUKANC TODD P.,SPENCE CHRISTOPHER A
Year of Publication 15.11.2006

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Method of enhancing clear field phase shift masks by adding parallel line to phase 0 region

by LUKANC, TODD P, SPENCE, CHRISTOPHER A
Year of Publication 01.11.2006

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Method of enhancing clear field phase shift masks with chrome border around phase 180 regions

by LUKANC, TODD P, SPENCE, CHRISTOPHER A
Year of Publication 01.11.2006

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Method of enhancing phase shift masks

by LUKANC TODD P.,SPENCE CHRISTOPHER A
Year of Publication 04.10.2006

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Two mask via pattern to improve pattern definition

by LYONS CHRISTOPHER F, LUKANC TODD
Year of Publication 08.08.2002

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Verfahren zum photolithographischen Herstellen einer integrierten Schaltung

by McGowan, Sarah N, Reiss, Joerg, Spence, Christopher A, Lukanc, Todd P, Capodieci, Luigi
Year of Publication 17.08.2017

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Method of enhancing clear field phase shift masks by adding parallel line to phase 0 region

by LUKANC TODD P.,SPENCE CHRISTOPHER A
Year of Publication 23.11.2005

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Method of enhancing phase shift masks

by SPENCE CHRISTOPHER A, LUKANC TODD P
Year of Publication 30.03.2005

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Method of enhancing clear field phase shift masks with border regions around phase 0 and phase 180 regions

by SPENCE CHRISTOPHER A, LUKANC TODD P
Year of Publication 30.03.2005

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Polishing pad and method for polishing porous materials

by SAHOTA KASHMIR S, LUKANC TODD
Year of Publication 17.04.2001

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Method of extending the areas of clear field phase shift generation

by SPENCE CHRISTOPHER A, LUKANC TODD P
Year of Publication 16.11.2004

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Method of extending the areas of clear field phase shift generation

by Lukanc, Todd P, Spence, Christopher A
Year of Publication 16.11.2004

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Method and enhancing clear field phase shift masks with border around edges of phase regions

by SPENCE CHRISTOPHER A, LUKANC TODD P
Year of Publication 28.09.2004

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Method and enhancing clear field phase shift masks with border around edges of phase regions

by Lukanc, Todd P, Spence, Christopher A
Year of Publication 28.09.2004

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METHOD OF ENHANCING PHASE SHIFT MASKS

by SPENCE, CHRISTOPHER, A, LUKANC, TODD, P
Year of Publication 08.09.2004

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