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"LUKANC TODD"
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"LUKANC TODD"
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Self-aligned contacts to source/drain silicon electrodes utilizing polysilicon and metal silicides
by
LUKANC
;
TODD
Year of Publication
01.08.2000
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METHOD OF FORMING AN ELECTRONIC DEVICE INCLUDING FORMING FEATURES WITHIN A MASK AND A SELECTIVE REMOVAL PROCESS
by
LUKANC TODD
,
KIM HUNG-EIL
Year of Publication
20.08.2009
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23
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Method and apparatus for generating trenches for vias
by
LUKANC TODD
P
Year of Publication
11.07.2006
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Method and apparatus for generating trenches for vias
by
Lukanc
,
Todd
P
Year of Publication
11.07.2006
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Methods and systems for designing and manufacturing optical lithography masks
by
VERMA, PIYUSH
,
LUKANC
,
TODD
P
Year of Publication
01.02.2015
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Method of enhancing clear field phase shift masks with chrome border around phase 180 regions
by
Lukanc
,
Todd
,
Spence, Christopher
Year of Publication
05.02.2004
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27
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Method of enhancing clear field phase shift masks with border regions around phase 0 and phase 180 regions
by
Lukanc
,
Todd
,
Spence, Christopher
Year of Publication
15.01.2004
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METHOD FOR ENHANCING POSITIVE (CLEAR FIELD) PHASE SHIFT MASK (TRANSPARENT PHASE SHIFT MASK WITH OPAQUE APERTURE) WITH BORDER REGIONS AROUND PHASE 0 REGION AND PHASE 180 REGIONS
by
SPENCE CHRISTOPHER A
,
LUKANC TODD
P
Year of Publication
10.12.2009
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Optimizing dense via arrays of shrunk integrated circuit designs
by
LUKANC TODD
P
Year of Publication
02.09.2003
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Optimizing dense via arrays of shrunk integrated circuit designs
by
Lukanc
,
Todd
P
Year of Publication
02.09.2003
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31
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SIDEWALL SPACER DEFINITION OF GATES
by
Lyons, Christopher
,
Lukanc
,
Todd
Year of Publication
02.01.2003
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32
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TWO MASK VIA PATTERN TO IMPROVE PATTERN DEFINITION
by
LUKANC
,
TODD
, P
Year of Publication
19.12.2002
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33
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Two mask via pattern to improve pattern definition
by
Lyons, Christopher
,
Lukanc
,
Todd
Year of Publication
08.08.2002
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Method of providing a frontside contact to a substrate of SOI device
by
Lukanc
,
Todd
,
Taylor, Kurt
Year of Publication
18.07.2002
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METHOD AND SYSTEM FOR AUTOMATED GENERATION OF MASKS FOR SPACER FORMATION FROM A DESIRED FINAL WAFER PATTERN
by
LO WAI
,
MARRIAN CHRISTIE
,
LUKANC TODD
Year of Publication
11.08.2011
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TWO MASK VIA PATTERN TO IMPROVE PATTERN DEFINITION
by
LUKANC
,
TODD
, P
Year of Publication
30.05.2002
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Electrical alignment test structure using local interconnect ladder resistor
by
SELCUK ASIM
,
LUKANC TODD
Year of Publication
07.05.2002
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Electrical alignment test structure using local interconnect ladder resistor
by
Lukanc
,
Todd
,
Selcuk, Asim
Year of Publication
07.05.2002
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METHOD OF ENHANCING PHASE SHIFT MASKS
by
SPENCE, CHRISTOPHER, A
,
LUKANC
,
TODD
, P
Year of Publication
21.05.2008
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METHOD OF ENHANCING CLEAR FIELD PHASE SHIFT MASKS WITH BORDER REGIONS AROUND PHASE 0 AND PHASE 180 REGIONS
by
SPENCE, CHRISTOPHER, A
,
LUKANC
,
TODD
, P
Year of Publication
21.05.2008
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