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"LUKANC, TODD"
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"LUKANC, TODD"
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Methods and systems for designing and manufacturing optical lithography masks
by
LUKANC TODD
P
,
VERMA PIYUSH
Year of Publication
23.06.2015
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METHODS AND SYSTEMS FOR DESIGNING AND MANUFACTURING OPTICAL LITHOGRAPHY MASKS
by
LUKANC TODD
P
,
VERMA PIYUSH
Year of Publication
05.02.2015
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Methods for optical proximity correction in the design and fabrication of integrated circuits
by
CLIFFORD CHRISTOPHER HEINZ
,
COSKUN TAMER
,
LUKANC TODD
Year of Publication
10.03.2015
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METHODS FOR OPTICAL PROXIMITY CORRECTION IN THE DESIGN AND FABRICATION OF INTEGRATED CIRCUITS
by
CLIFFORD CHRISTOPHER HEINZ
,
COSKUN TAMER
,
LUKANC TODD
Year of Publication
07.08.2014
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PHASE SHIFT MASK AND SYSTEM AND METHOD FOR MAKING THE SAME
by
LUKANC
,
TODD
Year of Publication
18.12.2003
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Method and system for automated generation of masks for spacer formation from a desired final wafer pattern
by
LO WAI
,
MARRIAN CHRISTIE
,
LUKANC TODD
Year of Publication
01.03.2016
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Method of forming an electronic device including forming features within a mask and a selective removal process
by
Lukanc
,
Todd
,
Kim, Hung-Eil
Year of Publication
23.08.2011
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Method of forming an electronic device including forming features within a mask and a selective removal process
by
LUKANC TODD
,
KIM HUNG-EIL
Year of Publication
23.08.2011
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Phase shift mask and system and method for making the same
by
LUKANC
,
TODD
Year of Publication
01.04.2003
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Phase shift mask and system and method for making the same
by
Lukanc
,
Todd
Year of Publication
18.03.2003
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Phase shift mask and system and method for making the same
by
LUKANC TODD
Year of Publication
18.03.2003
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Method for increasing manufacturability of a circuit layout
by
Singhal, Ajay
,
Lukanc
,
Todd
Year of Publication
03.02.2009
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Method for increasing manufacturability of a circuit layout
by
SINGHAL AJAY
,
LUKANC TODD
Year of Publication
03.02.2009
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PHASE SHIFT MASK AND SYSTEM AND METHOD FOR MAKING THE SAME
by
LUKANC
,
TODD
Year of Publication
08.08.2002
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Phase shift mask and system and method for making the same
by
Lukanc
,
Todd
Year of Publication
01.08.2002
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Phase shift mask and system and method for making the same
by
LUKANC TODD
Year of Publication
01.08.2002
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Self-aligned contacts to source/drain silicon electrodes utilizing polysilicon and silicides
by
LUKANC TODD
Year of Publication
18.09.2001
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Methods and systems for designing and manufacturing optical lithography masks
by
VERMA, PIYUSH
,
LUKANC
,
TODD
P
Year of Publication
01.09.2016
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MOS transistor formation
by
LUKANC TODD
Year of Publication
06.02.2001
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NOVEL FRONTSIDE CONTACT TO SUBSTRATE OF SOI DEVICE
by
TAYLOR, KURT, O
,
LUKANC
,
TODD
, P
Year of Publication
26.09.2012
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