MICROMECHANICAL COMPONENT FOR A CAPACITIVE PRESSURE SENSOR DEVICE, CAPACITIVE PRESSURE SENSOR DEVICE, AND A MANUFACTURING METHOD FOR A CAPACITIVE PRESSURE SENSOR DEVICE
Mach, Sophielouise, Senz, Volkmar, Lukacs, Ferenc, Baraki, Raschid, Erdosi, Mate, Friedrich, Thomas
Year of Publication 01.02.2024
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Year of Publication 01.02.2024
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Micromechanical component for capacitive pressure sensor device, capacitive pressure sensor device and production method for capacitive pressure sensor device
FRIEDRICH THOMAS, LUKACS FERENC, ERDOS, MELISSA, MAHER STEPHEN, BARAKI RASMUS, SENZ VOLKMAR
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Year of Publication 10.11.2023
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MICROMECHANICAL PRESSURE SENSOR
Schwarz, Mike, Senz, Volkmar, Lukacs, Ferenc, Dannenberg, Arne, Grutzeck, Helmut, Maul, Robert, Dögei, Tamas, Heuck, Friedjof, Friedrich, Thomas
Year of Publication 12.12.2019
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Year of Publication 12.12.2019
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The Reaction of Alkenes with Triangulo-Clusters [Pt3(μ-CO)3(PR3)3]
Ros, Renzo, Facchin, Giacomo, Tassan, Augusto, Roulet, Raymond, Laurenczy, Gàbor, Lukacs, Ferenc
Published in Journal of cluster science (01.03.2001)
Published in Journal of cluster science (01.03.2001)
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MICROMECHANICAL COMPONENT FOR A CAPACITATIVE PRESSURE SENSOR DEVICE, CAPACITATIVE PRESSURE SENSOR DEVICE AND A MANUFACTURING METHOD FOR A CAPACITATIVE PRESSURE SENSOR DEVICE
FRIEDRICH, Thomas, MACH, Sophielouise, BARAKI, Raschid, SENZ, Volkmar, ERDOSI, Mate, LUKACS, Ferenc
Year of Publication 23.06.2022
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Year of Publication 23.06.2022
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Mikromechanisches Bauteil für eine kapazitive Drucksensorvorrichtung, kapazitive Drucksensorvorrichtung und ein Herstellungsverfahren für eine kapazitive Drucksensorvorrichtung
Mach, Sophielouise, Senz, Volkmar, Lukacs, Ferenc, Baraki, Raschid, Erdosi, Mate, Friedrich, Thomas
Year of Publication 23.06.2022
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Year of Publication 23.06.2022
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MICROMECHANICAL PRESSURE SENSOR
HEUCK FRIEDJOF, MAUL ROBERT, FRIEDRICH THOMAS, LUKACS FERENC, SCHWARZ MIKE, DANNENBERG ARNE, GRUTZECK HELMUT, DOGEI TAMAS, SENZ VOLKMAR
Year of Publication 25.10.2019
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Year of Publication 25.10.2019
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MICROMECHANICAL PRESSURE SENSOR
HEUCK, Friedjof, FRIEDRICH, Thomas, GRUTZECK, Helmut, SCHWARZ, Mike, SENZ, Volkmar, DANNENBERG, Arne, MAUL, Robert, LUKACS, Ferenc, DÖGEI, Tamas
Year of Publication 07.09.2018
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Year of Publication 07.09.2018
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Mikromechanischer Drucksensor
Schwarz, Mike, Senz, Volkmar, Lukacs, Ferenc, Dannenberg, Arne, Grutzeck, Helmut, Maul, Robert, Heuck, Friedjof, Friedrich, Thomas, Dögei, Tamás
Year of Publication 18.01.2018
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Year of Publication 18.01.2018
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