Enhanced second-harmonic generation in AlGaAs/AlxOy tightly confining waveguides and resonant cavities
Scaccabarozzi, Luigi, Fejer, M M, Huo, Yijie, Fan, Shanhui, Yu, Xiaojun, Harris, James S
Published in Optics letters (15.12.2006)
Published in Optics letters (15.12.2006)
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Journal Article
Growth of GaAs with orientation-patterned structures for nonlinear optics
Yu, Xiaojun, Scaccabarozzi, Luigi, Lin, Angie C., Fejer, Martin M., Harris, James S.
Published in Journal of crystal growth (01.04.2007)
Published in Journal of crystal growth (01.04.2007)
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Journal Article
Conference Proceeding
MEMBRANES FOR USE WITHIN LITHOGRAPHIC APPARATUS, AND LITHOGRAPHIC APPARATUS COMPRISING SUCH MEMBRANE
BANINE VADIM YEVGENYEVICH, PIETER-JAN VAN ZWOL, MARIA PETER, WILLEM JOAN VAN DER ZANDE, ANDREI MIKHAILOVICH YAKUNIN, JOZEF PETRUS HENRICUS BENSCHOP, LUIGI SCACCABAROZZI, ANDREY NIKIPELOV, ALEXEY SERGEEVICH KUZNETSOV, ARJEN BOOGAARD, FLORIAN DIDIER ALBIN DHALLUIN
Year of Publication 28.11.2019
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Year of Publication 28.11.2019
Patent
LITHOGRAPHIC APPARATUS AND METHOD
PAULUS ALBERTUS MARIA GASSELING, LUIGI SCACCABAROZZI, HANS JOERG MALLMANN, ALEXANDER MARINUS ARNOLDUS HUIJBERTS, VAN KAMPEN MAARTEN, ARTHUR WINFRIED EDUARDUS MINNAERT, KURSAT BAL, BANINE VADIM YEVGENYEVICH, CARLO CORNELIS MARIA LUIJTEN, JOHANNUS ELISABETH HUBERTUS MUITJENS, NICOLAAS ALDEGONDA JAN MARIA VAN AERLE, HAN-KWANG NIENHUYS, YAKUNIN ANDREY MIKHAILOVICH, PEDRO JULIAN RIZO DIAGO
Year of Publication 12.04.2018
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Year of Publication 12.04.2018
Patent
Particle Cleaning of EUV Reticles
Scaccabarozzi, Luigi, Lammers, Niels A., Moors, Roel, Banine, Vadim
Published in Journal of adhesion science and technology (01.01.2009)
Published in Journal of adhesion science and technology (01.01.2009)
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Journal Article
Dichroic mirror embedded in a submicrometer waveguide for enhanced resonant nonlinear optical devices
Scaccabarozzi, Luigi, Fejer, M M, Huo, Yijie, Fan, Shanhui, Yu, Xiaojun, Harris, James S
Published in Optics letters (15.11.2006)
Published in Optics letters (15.11.2006)
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Journal Article
Suppression filter, radiation collector and radiation source for a lithographic apparatus; method of determining a separation distance between at least two reflective surface levels of a suppression filter
Banine, Vadim Yevgenyevich, Scaccabarozzi, Luigi, Nienhuys, Han-Kwang
Year of Publication 09.06.2020
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Year of Publication 09.06.2020
Patent
SUPPRESSION FILTER, RADIATION COLLECTOR AND RADIATION SOURCE FOR A LITHOGRAPHIC APPARATUS; METHOD OF DETERMINING A SEPARATION DISTANCE BETWEEN AT LEAST TWO REFLECTIVE SURFACE LEVELS OF A SUPPRESSION FILTER
SCACCABAROZZI, Luigi, NIENHUYS, Han-Kwang, BANINE, Vadim Yevgenyevich
Year of Publication 30.08.2018
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Year of Publication 30.08.2018
Patent
OBJECT INSPECTION SYSTEMS AND METHODS
BANINE, Vadim, SCACCABAROZZI, Luigi, IVANOV, Vitalii, IOSAD, Nikolay, DEN BOEF, Arie
Year of Publication 15.04.2020
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Year of Publication 15.04.2020
Patent
MEMBRANES FOR USE WITHIN A LITHOGRAPHIC APPARATUS AND A LITHOGRAPHIC APPARATUS COMPRISING SUCH A MEMBRANE
DHALLUIN, FLORIAN DIDIER ALBIN, KUZNETSOV, ALEXEY SERGEEVICH, VAN DER ZANDE, WILLEM JOAN, NIKIPELOV, ANDREY ALEXANDROVICH, VAN ZWOL, PIETER-JAN, BANINE, VADIM YEVGENYEVICH, BENSCHOP, JOZEF PETRUS HENRICUS, PETER, MARIA, BOOGAARD, ARJEN, YAKUNIN, ANDREI MIKHAILOVICH, SCACCABAROZZI, LUIGI
Year of Publication 30.08.2022
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Year of Publication 30.08.2022
Patent
SUPPRESSION FILTER, RADIATION COLLECTOR AND RADIATION SOURCE FOR A LITHOGRAPHIC APPARATUS; METHOD OF DETERMINING A SEPARATION DISTANCE BETWEEN AT LEAST TWO REFLECTIVE SURFACE LEVELS OF A SUPPRESSION FILTER
SCACCABAROZZI, Luigi, BANINE, Vadim, Yevgenyevich, NIENHUYS, Han-Kwang
Year of Publication 02.03.2017
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Year of Publication 02.03.2017
Patent
Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane
Van Der Zande, Willem Joan, Péter, Mária, Banine, Vadim Yevgenyevich, Scaccabarozzi, Luigi, Benschop, Jozef Petrus Henricus, Dhalluin, Florian Didier Albin, Van Zwol, Pieter-Jan
Year of Publication 30.06.2020
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Year of Publication 30.06.2020
Patent
MEMBRANES FOR USE WITHIN A LITHOGRAPHIC APPARATUS AND A LITHOGRAPHIC APPARATUS COMPRISING SUCH A MEMBRANE
DHALLUIN, Florian, Didier, Albin, VAN DER ZANDE, Willem, Joan, BENSCHOP, Jozef, Petrus, Henricus, BOOGAARD, Arjen, NIKIPELOV, Andrey, Alexandrovich, SCACCABAROZZI, Luigi, KUZNETSOV, Alexey, Sergeevich, PÉTER, Mária, VAN ZWOL, Pieter-Jan, YAKUNIN, Andrei, Mikhailovich, BANINE, Vadim, Yevgenyevich
Year of Publication 24.02.2021
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Year of Publication 24.02.2021
Patent
MEMBRANES FOR USE WITHIN A LITHOGRAPHIC APPARATUS AND A LITHOGRAPHIC APPARATUS COMPRISING SUCH A MEMBRANE
BENSCHOP, Jozef Petrus Henricus, SCACCABAROZZI, Luigi, PÉTER, Mária, VAN ZWOL, Pieter-Jan, VAN DER ZANDE, Willem Joan, DHALLUIN, Florian Didier Albin, BANINE, Vadim Yevgenyevich
Year of Publication 16.05.2019
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Year of Publication 16.05.2019
Patent