Verfahren zur Herstellung einer Polierschicht für ein chemisch-mechanisches Polierkissen
Lugo, Diego, Qian, Bainian, Miller, Jeffrey B, Wank, Andrew, Yeh, Fengji, Degroot, Marty, Brufau, Teresa Brugarolas, Tong, Yuhua, Veneziale, David Michael, Jacob, George C, Kozhukh, Julia
Year of Publication 29.12.2016
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Year of Publication 29.12.2016
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Method of making composite polishing layer for chemical mechanical polishing pad
BRUGAROLAS BRUFAU, TERESA, LUGO, DIEGO, QIAN, BAINIAN, VENEZIALE, DAVID MICHAEL, HENDRON, JEFFREY JAMES, TRAN, TONY QUAN, TONG, YUHUA, JACOB, GEORGE C, KOZHUKH, JULIA, MILLER, JEFFREY B, WANK, ANDREW, STACK, MARC R
Year of Publication 01.01.2017
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Year of Publication 01.01.2017
Patent
Chemical mechanical polishing pad and method of making same
LUGO, DIEGO, DEGROOT, MARTY W, VENEZIALE, DAVID MICHAEL, JACOB, GEORGE C, KOZHUKH, JULIA, STACK, MARC R, BRUGAROLAS BRUFAU, TERESA, QIAN, BAINIAN, TRAN, TONY QUAN, YEH, FENGJI, TONG, YUHUA, MILLER, JEFFREY B, WANK, ANDREW
Year of Publication 01.01.2017
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Year of Publication 01.01.2017
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FR3037834
KOZHUKH JULIA, WANK ANDREW, YEH FENGJI, MILLER JEFFREY B, TRAN Tony Quan, QIAN BAINIAN, BRUGAROLAS BRUFAU TERESA, DEGROOT MARTY, TONG YUHUA, JACOB GEORGE C, LUGO DIEGO, STACK MARC R, VENEZIALE DAVID MICHAEL
Year of Publication 30.12.2016
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Year of Publication 30.12.2016
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FR3037836
BRUGAROLAS BRUFAU TERESA, KOZHUKH JULIA, HENDRON JEFFREY JAMES, TONG YUHUA, JACOB GEORGE C, LUGO DIEGO, STACK MARC R, VENEZIALE DAVID MICHAEL, WANK ANDREW, MILLER JEFFREY B, TRAN Tony Quan, QIAN BAINIAN
Year of Publication 30.12.2016
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Year of Publication 30.12.2016
Patent
Chemisch-mechanisches Polierkissen und Verfahren zu dessen Herstellung
Lugo, Diego, Qian, Bainian, Miller, Jeffrey B, Yeh, Fengji, Stack, Marc R, Veneziale, David Michael, Jacob, George C, Kozhukh, Julia, Wank, Andrew, Tran, Tony Quan, Brufau, Teresa Brugarolas, Tong, Yuhua, DeGroot, Marty
Year of Publication 29.12.2016
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Year of Publication 29.12.2016
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Verfahren zur Herstellung einer Verbundpolierschicht für ein chemisch-mechanisches Polierkissen
Lugo, Diego, Qian, Bainian, Miller, Jeffrey B, Wank, Andrew, Tran, Tony Quan, Stack, Marc R, Brufau, Teresa Brugarolas, Tong, Yuhua, Veneziale, David Michael, Hendron, Jeffrey James, Jacob, George C, Kozhukh, Julia
Year of Publication 29.12.2016
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Year of Publication 29.12.2016
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