Growth of GaN/AlGaN on 200 mm diameter silicon (111) wafers by MOCVD
Boyd, Adam R., Degroote, Stefan, Leys, Maarten, Schulte, Frank, Rockenfeller, Olaf, Luenenbuerger, Markus, Germain, Marianne, Kaeppeler, Johannes, Heuken, Michael
Published in Physica status solidi. C (01.06.2009)
Published in Physica status solidi. C (01.06.2009)
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Journal Article
TWI571528B
LEIERS, RALF, LUENENBUERGER, MARKUS, BUECHEL, KARL-HEINZ, STRAUCH, GERHARD KARL, SCHINELLER, BERND
Year of Publication 21.02.2017
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Year of Publication 21.02.2017
Patent