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"LUCCHESI KEN"
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"LUCCHESI KEN"
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정적 자기장을 사용한 플라즈마 균일도 제어
by
MARAKHTANOV ALEXEI
,
LUCCHESI KEN
,
HOLLAND JOHN
,
JI BING
Year of Publication
18.07.2023
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펄스 자기장을 사용한 플라즈마 균일성 제어
by
MARAKHTANOV ALEXEI
,
LUCCHESI KEN
,
HOLLAND JOHN
,
JI BING
Year of Publication
18.07.2023
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RF CONTROL OF IMPEDANCE OF RF RETURN PATH
by
MARAKHTANOV ALEXEI
,
LUCCHESI KEN
,
ALBAREDE LUC
,
DHINDSA RAJINDER
Year of Publication
20.03.2023
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RF CONTROL OF IMPEDANCE OF RF RETURN PATH
by
MARAKHTANOV ALEXEI
,
LUCCHESI KEN
,
ALBAREDE LUC
,
DHINDSA RAJINDER
Year of Publication
31.03.2022
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SYSTEM, METHOD AND APPARATUS FOR DETECTING DC BIAS IN A PLASMA PROCESSING CHAMBER
by
MARAKHTANOV ALEXEI
,
LUCCHESI KEN
,
DHINDSA RAJINDER
Year of Publication
05.08.2014
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PLASMA UNIFORMITY CONTROL USING A STATIC MAGNETIC FIELD
by
Lucchesi
,
Ken
,
Ji, Bing
,
Holland, John
,
Marakhtanov, Alexei
Year of Publication
21.09.2023
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PLASMA UNIFORMITY CONTROL USING A PULSED MAGNETIC FIELD
by
Lucchesi
,
Ken
,
Ji, Bing
,
Holland, John
,
Marakhtanov, Alexei
Year of Publication
13.07.2023
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PLASMA UNIFORMITY CONTROL USING A PULSED MAGNETIC FIELD
by
HOLLAND, John
,
JI, Bing
,
LUCCHESI
,
Ken
,
MARAKHTANOV, Alexei
Year of Publication
27.05.2022
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PLASMA UNIFORMITY CONTROL USING A STATIC MAGNETIC FIELD
by
HOLLAND, John
,
JI, Bing
,
LUCCHESI
,
Ken
,
MARAKHTANOV, Alexei
Year of Publication
27.05.2022
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Control of impedance of RF return path
by
Lucchesi
,
Ken
,
Albarede, Luc
,
Marakhtanov, Alexei
,
Dhindsa, Rajinder
Year of Publication
02.04.2019
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Control of impedance of RF delivery path
by
Lucchesi
,
Ken
,
Albarede, Luc
,
Marakhtanov, Alexei
,
Dhindsa, Rajinder
Year of Publication
18.12.2018
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CONTROL OF IMPEDANCE OF RF RETURN PATH
by
Luc Albarede
,
Ken Lucchesi
,
Alexei Marakhtanov
,
Rajinder Dhindsa
Year of Publication
30.10.2018
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CONTROL OF IMPEDANCE OF RF DELIVERY PATH
by
Luc Albarede
,
Ken Lucchesi
,
Alexei Marakhtanov
,
Rajinder Dhindsa
Year of Publication
30.10.2018
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System, method and apparatus for detecting DC bias in a plasma processing chamber
by
MARAKHTANOV ALEXEI
,
LUCCHESI KEN
,
DHINDSA RAJINDER
Year of Publication
28.10.2014
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CONTROL OF IMPEDANCE OF RF DELIVERY PATH
by
Lucchesi Ken
,
Marakhtanov Alexei
,
Albarede Luc
,
Dhindsa Rajinder
Year of Publication
20.10.2016
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Control of Impedance of RF Return Path
by
Lucchesi Ken
,
Marakhtanov Alexei
,
Albarede Luc
,
Dhindsa Rajinder
Year of Publication
11.08.2016
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Control of impedance of RF delivery path
by
Lucchesi Ken
,
Marakhtanov Alexei
,
Albarede Luc
,
Dhindsa Rajinder
Year of Publication
26.07.2016
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Control of impedance of RF return path
by
MARAKHTANOV ALEXEI
,
LUCCHESI KEN
,
ALBAREDE LUC
,
DHINDSA RAJINDER
Year of Publication
10.05.2016
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SYSTEM, METHOD AND APPARATUS FOR DETECTING DC BIAS IN A PLASMA PROCESSING CHAMBER
by
MARAKHTANOV, ALEXEI
,
LUCCHESI
,
KEN
,
DHINDSA, REGINALD
Year of Publication
30.05.2013
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SYSTEM, METHOD AND APPARATUS FOR DETECTING DC BIAS IN A PLASMA PROCESSING CHAMBER
by
MARAKHTANOV ALEXEI
,
LUCCHESI KEN
,
DHINDSA RAJINDER
Year of Publication
23.05.2013
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