Resonant process monitor
Tae, Patrick John, Pan, Yaoling, Willwerth, Michael D, Tedeschi, Leonard, Chan, Kelvin, Goel, Ashish, Kraus, Philip Allan, Lu, Chih-shun, Subramani, Anantha, Krithivasan, Vijaykumar, Mao, Shimin
Year of Publication 10.01.2023
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Year of Publication 10.01.2023
Patent
Relationship of Resonant Frequency of Quartz Crystal to Mass Loading
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Conference Proceeding
RESONANT PROCESS MONITOR
MAO, Shimin, WILLWERTH, Michael D, GOEL, Ashish, CHAN, Kelvin, KRAUS, Philip Allan, TAE, Patrick John, PAN, Yaoling, LU, Chih-shun, SUBRAMANI, Anantha, TEDESCHI, Leonard, KRITHIVASAN, Vijaykumar
Year of Publication 19.09.2019
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Year of Publication 19.09.2019
Patent
Processing tool, resonant process monitor and the method of forming the same
PAN, YAOLING, TEDESCHI, LEONARD, KRAUS, PHILIP ALLAN, SUBRAMANI, ANANTHA, MAO, SHIMIN, WILLWERTH, MICHAEL D, TAE, PATRICK JOHN, KRITHIVASAN, VIJAYKUMAR, CHAN, KELVIN, GOEL, ASHISH, LU, CHIH-SHUN
Year of Publication 11.05.2023
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Year of Publication 11.05.2023
Patent
RESONANT PROCESS MONITOR
TAE PATRICK JOHN, CHAN KELVIN, KRITHIVASAN VIJAYKUMAR, WILLWERTH MICHAEL D, PAN YAOLING, KRAUS PHILIP ALLAN, MAO SHIMIN, SUBRAMANI ANANTHA, GOEL ASHISH, LU CHIH-SHUN, TEDESCHI LEONARD
Year of Publication 27.09.2019
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Year of Publication 27.09.2019
Patent
Resonant process monitor
PAN, YAOLING, TEDESCHI, LEONARD, KRAUS, PHILIP ALLAN, MAO, SHI-MIN, SUBRAMANI, ANANTHA, WILLWERTH, MICHAEL D, TAE, PATRICK JOHN, KRITHIVASAN, VIJAYKUMAR, CHAN, KELVIN, GOEL, ASHISH, LU, CHIH-SHUN
Year of Publication 16.01.2020
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Year of Publication 16.01.2020
Patent