The Effect of Metal-Film Thickness on Pattern Formation by Using Direct Imprint
Cheng, Ming-Chieh, Hsiung, Hsin-Yi, Lu, Ying-Ti, Sung, Cheng-Kuo
Published in Japanese Journal of Applied Physics (01.09.2007)
Published in Japanese Journal of Applied Physics (01.09.2007)
Get full text
Journal Article
Finite element method investigation into nanoimprinting of aluminum/polyimide bi-layer substrates
Liu, De Shin, Tsai, Chin Yuan, Lu, Ying Ti, Sung, Cheng Kuo, Chung, Cho Liang
Published in Microelectronic engineering (01.11.2010)
Published in Microelectronic engineering (01.11.2010)
Get full text
Journal Article