Methods and apparatus for transporting substrate carriers
HUDGENS, JEFFREY C, LOWRANCE, ROBERT B, RICE, MICHAEL R, ENGLHARDT, ERIC ANDREW, ELLIOT, MARTIN R
Year of Publication 06.10.2004
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Year of Publication 06.10.2004
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Methods and apparatus for transporting substrate carriers
HUDGENS JEFFREY C, RICE MICHAEL R, ELLIOTT MARTIN R, ENGLHARDT ERIC A, LOWRANCE ROBERT B
Year of Publication 30.09.2004
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Year of Publication 30.09.2004
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METHOD AND FOR TRANSPORTING SUBSTRATE CARRIER
HUDGENS JEFFREY C, RICE MICHAEL R, ELLIOTT MARTIN R, ENGLHARDT ERIC A, LOWRANCE ROBERT B
Year of Publication 30.09.2004
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Year of Publication 30.09.2004
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SYSTEM FOR TRANSPORTING SUBSTRATE CARRIER
HUDGENS JEFFREY C, RICE MICHAEL R, ELLIOTT MARTIN R, ENGLHARDT ERIC A, LOWRANCE ROBERT B
Year of Publication 24.09.2004
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Year of Publication 24.09.2004
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OVERHEAD TRANSFER FLANGE AND SUPPORT BODY FOR SUSPENDING SUBSTRATE CARRIER
HUDGENS JEFFREY C, RICE MICHAEL R, ELLIOTT MARTIN R, ENGLHARDT ERIC A, LOWRANCE ROBERT B
Year of Publication 24.09.2004
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Year of Publication 24.09.2004
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Overhead transfer flange and support for suspending a substrate carrier
HUDGENS, JEFFREY C, RICE, MICHAEL R, ELLIOTT, MARTIN R, ENGLHARDT,ERIC ANDREW, LOWRANCE ROBERT B
Year of Publication 25.08.2004
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Year of Publication 25.08.2004
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System and method for transferring substrates carriers between processing tools
HUDGENS, JEFFREY C, RICE, MICHAEL R, SHAH, VINAY, ELLIOTT, MARTIN, ENGLHARDT, ERIC ANDREW, LOWRANCE, ROBERT, B
Year of Publication 25.08.2004
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Year of Publication 25.08.2004
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METHODS AND APPARATUS FOR TRANSPORTING SUBSTRATE CARRIERS
RICE, MICHAEL, R, ELLIOTT, MARTIN, R, ENGLHARDT, ERIC, A, HUDGENS, JEFFREY, C, LOWRANCE, ROBERT, B
Year of Publication 12.08.2004
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Year of Publication 12.08.2004
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Methods and apparatus for transporting substrate carriers
HUDGENS, JEFFREY C, LOWRANCE, ROBERT B, RICE, MICHAEL R, ENGLHARDT, ERIC ANDREW, ELLIOT, MARTIN R
Year of Publication 11.08.2004
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Year of Publication 11.08.2004
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Substrate carrier having door latching and substrate clamping mechanisms
HUDGENS JEFFREY C, RICE MICHAEL R, ELLIOTT MARTIN R, ENGLHARDT ERIC A, LOWRANCE ROBERT B
Year of Publication 18.07.2012
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Year of Publication 18.07.2012
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Electro-chemical deposition cell for face-up processing of single semiconductor substrates
DORDI, YEZDI, LOWRANCE, ROBERT B, SUGARMAN, MICHAEL N, EDWARDS, ROY, STEVENS, JOE
Year of Publication 01.06.2004
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Year of Publication 01.06.2004
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SUBSTRATE CARRIER HANDLER FOR DIRECTLY UNLOADING SUBSTRATE CARRIER FROM MOVING CONVEYOR
HUDGENS JEFFREY C, RICE MICHAEL R, ELLIOTT MARTIN R, ENGLHARDT ERIC A, LOWRANCE ROBERT B
Year of Publication 30.04.2004
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Year of Publication 30.04.2004
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Method and apparatus for supplying substrates to a processing tool
HUDGENS JEFFREY C, RICE MICHAEL R, ELLIOTT MARTIN R, ENGLHARDT ERIC A, LOWRANCE ROBERT B
Year of Publication 29.04.2004
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Year of Publication 29.04.2004
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Substrate carrier having door latching and substrate clamping mechanisms
HUDGENS JEFFREY C, RICE MICHAEL R, ELLIOTT MARTIN R, ENGLHARDT ERIC A, LOWRANCE ROBERT B
Year of Publication 29.04.2004
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Year of Publication 29.04.2004
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METHOD AND APPARATUS FOR SUPPLYING SUBSTRATES TO A PROCESSING TOOL
RICE, MICHAEL, R, ELLIOTT, MARTIN, R, ENGLHARDT, ERIC, A, HUDGENS, JEFFREY, C, LOWRANCE, ROBERT, B
Year of Publication 15.04.2004
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Year of Publication 15.04.2004
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System for transporting substrate carriers
RICE MICHAEL ROBERT, HUDGENS JEFFREY C, ELLIOTT MARTIN R, ENGLHARDT ERIC A, LOWRANCE ROBERT B
Year of Publication 01.04.2004
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Year of Publication 01.04.2004
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