KINEMATIC PIN WITH SHEAR MEMBER AND SUBSTRATE CARRIER FOR USE THEREWITH
HUDGENS JEFFREY C, RICE MICHAEL R, ELLIOTT MARTIN R, ENGLHARDT ERIC A, LOWRANCE ROBERT B
Year of Publication 28.02.2008
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Year of Publication 28.02.2008
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KINEMATIC PIN WITH SHEAR MEMBER AND SUBSTRATE CARRIER FOR USE THEREWITH
HUDGENS JEFFREY C, RICE MICHAEL R, ELLIOTT MARTIN R, ENGLHARDT ERIC A, LOWRANCE ROBERT B
Year of Publication 28.02.2008
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Year of Publication 28.02.2008
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Methods and apparatus for a band to band transfer module
SHAH VINAY, HUDGENS JEFFREY C, ENGLHARDT ERIC ANDREW, RICE MICHAEL R, KOSHTI SUSHANT S, LOWRANCE ROBERT B
Year of Publication 18.08.2009
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Year of Publication 18.08.2009
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Methods and apparatus for a band to band transfer module
Lowrance, Robert B, Englhardt, Eric Andrew, Rice, Michael R, Shah, Vinay, Koshti, Sushant S, Hudgens, Jeffrey C
Year of Publication 18.08.2009
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Year of Publication 18.08.2009
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OVERHEAD TRANSFER FLANGE AND SUPPORT FOR SUSPENDING A SUBSTRATE CARRIER
HUDGENS JEFFREY C, RICE MICHAEL R, ELLIOTT MARTIN R, ENGLHARDT ERIC A, LOWRANCE ROBERT B
Year of Publication 24.01.2008
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Year of Publication 24.01.2008
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System and method for transferring substrates carriers between processing tools
HUDGENS, JEFFREY C, RICE, MICHAEL R, SHAH, VINAY, ELLIOTT, MARTIN, ENGLHARDT, ERIC ANDREW, LOWRANCE, ROBERT, B
Year of Publication 12.12.2007
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Year of Publication 12.12.2007
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METHODS AND APPARATUS FOR TRANSPORTING SUBSTRATE CARRIERS
HUDGENS JEFFREY C, RICE MICHAEL R, ELLIOTT MARTIN R, ENGLHARDT ERIC A, LOWRANCE ROBERT B
Year of Publication 06.12.2007
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Year of Publication 06.12.2007
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METHODS AND APPARATUS FOR A TRANSPORT LIFT ASSEMBLY
RICE, MICHAEL, R, SHAH, VINAY, ENGLHARDT, ERIC, A, HUDGENS, JEFFREY, C, LOWRANCE, ROBERT, B
Year of Publication 29.11.2007
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Year of Publication 29.11.2007
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Substrate carrier having door latching and substrate clamping mechanisms
HUDGENS JEFFREY C, RICE MICHAEL R, ELLIOTT MARTIN R, ENGLHARDT ERIC A, LOWRANCE ROBERT B
Year of Publication 27.11.2007
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Year of Publication 27.11.2007
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Substrate carrier having door latching and substrate clamping mechanisms
Elliott, Martin R, Rice, Michael R, Lowrance, Robert B, Hudgens, Jeffrey C, Englhardt, Eric A
Year of Publication 27.11.2007
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Year of Publication 27.11.2007
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Methods and apparatus for transporting substrate carriers
Rice, Michael R, Lowrance, Robert B, Elliott, Martin R, Hudgens, Jeffrey C, Englhardt, Eric A
Year of Publication 13.11.2007
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Year of Publication 13.11.2007
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Methods and apparatus for transporting substrate carriers
HUDGENS JEFFREY C, RICE MICHAEL R, ELLIOTT MARTIN R, ENGLHARDT ERIC A, LOWRANCE ROBERT B
Year of Publication 13.11.2007
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Year of Publication 13.11.2007
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METHODS AND APPARATUS FOR A BAND TO BAND TRANSFER MODULE
RICE, MICHAEL, R, SHAH, VINAY, KOSHTI, SUSHANT, ENGLHARDT, ERIC, A, HUDGENS, JEFFREY, C, LOWRANCE, ROBERT, B
Year of Publication 11.10.2007
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Year of Publication 11.10.2007
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SYSTEM FOR TRANSPORTING SUBSTRATE CARRIERS
HUDGENS JEFFREY C, RICE MICHAEL R, ELLIOTT MARTIN R, ENGLHARDT ERIC A, LOWRANCE ROBERT B
Year of Publication 11.10.2007
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Year of Publication 11.10.2007
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CALIBRATION OF HIGH SPEED LOADER TO SUBSTRATE TRANSPORT SYSTEM
HUDGENS JEFFREY C, KATWYK KIRK VAN, RICE MICHAEL R, ELLIOTT MARTIN R, ENGLHARDT ERIC A, LOWRANCE ROBERT B, PURI AMIT
Year of Publication 29.01.2009
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Year of Publication 29.01.2009
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METHODS AND APPARATUS FOR A TRANSFER STATION
RICE, MICHAEL, R, SHAH, VINAY, KOSHTI, SUSHANT, ENGLHARDT, ERIC, A, HUDGENS, JEFFREY, C, LOWRANCE, ROBERT, B
Year of Publication 05.07.2007
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Year of Publication 05.07.2007
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