Fabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications
Dellmann, L., Roth, S., Beuret, C., Racine, G.-A., Lorenz, H., Despont, M., Renaud, P., Vettiger, P., de Rooij, N.F.
Published in Sensors and actuators. A. Physical. (01.10.1998)
Published in Sensors and actuators. A. Physical. (01.10.1998)
Get full text
Journal Article
Procédé et équipement d'usinage correctif de pièces microtechniques
Hubert Lorenz, Fabrice Lambert, Ivan Calderon, Philippe Jacot, Grégoire Genolet
Year of Publication 15.11.2023
Get full text
Year of Publication 15.11.2023
Patent
Inductive proximity sensor with a flat coil and a new differential relaxation oscillator
Passeraub, Ph.A, Rey-Mennet, G, Besse, P.A, Lorenz, H, Popovic, R.S
Published in Sensors and actuators. A. Physical. (01.05.1997)
Published in Sensors and actuators. A. Physical. (01.05.1997)
Get full text
Journal Article