Lithographic apparatus comprising a magnet, method for the protection of a magnet in a lithographic apparatus and device manufacturing method
LOOPSTRA ERIK ROELO, KEMPEN ANTONIUS THEODORUS WILHELMUS, MOORS JOHANNES HUBERTUS JOSEPHINA, SMEETS MARTIN FRANS PIERRE, KOSTER NORBERTUS BENEDICTUS
Year of Publication 21.05.2013
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Year of Publication 21.05.2013
Patent