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"LOKAI PETER"
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"LOKAI PETER"
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High-resolution confocal Fabry-Perot interferometer for absolute spectral parameter detection of excimer laser used in lithography applications
by
LOKAI PETER
Year of Publication
28.08.2003
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High-resolution confocal Fabry-Perot interferometer for absolute spectral parameter detection of excimer laser used in lithography applications
by
Lokai
,
Peter
Year of Publication
28.08.2003
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On-line quality control of the key optical components in lithography lasers using laser induced fluorescence
by
Lokai
,
Peter
,
Seddighi, Farid
Year of Publication
04.01.2005
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Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp
by
LOKAI PETER
,
SCHROEDER THOMAS
Year of Publication
17.06.2003
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Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp
by
Lokai
,
Peter
,
Schroeder, Thomas
Year of Publication
17.06.2003
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Narrow band excimer or molecular fluorine laser having an output coupling interferometer
by
Kleinschmidt, Juergen
,
Lokai
,
Peter
Year of Publication
20.05.2003
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Narrow band excimer or molecular fluorine laser having an output coupling interferometer
by
KLEINSCHMIDT JUERGEN
,
LOKAI PETER
Year of Publication
20.05.2003
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Narrow band excimer or molecular fluorine laser having an output coupling interferometer
by
KLEINSCHMIDT JUERGEN
,
LOKAI PETER
Year of Publication
22.04.2003
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Narrow band excimer or molecular fluorine laser having an output coupling interferometer
by
Kleinschmidt, Juergen
,
Lokai
,
Peter
Year of Publication
22.04.2003
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Narrow band excimer or molecular fluorine laser having an output coupling interferometer
by
KLEINSCHMIDT JUERGEN
,
LOKAI PETER
Year of Publication
04.02.2003
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Narrow band excimer or molecular fluorine laser having an output coupling interferometer
by
Kleinschmidt, Juergen
,
Lokai
,
Peter
Year of Publication
04.02.2003
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Narrow band excimer or molecular fluorine laser having an output coupling interferometer
by
Lokai
,
Peter
,
Kleinschmidt, Juergen
Year of Publication
03.10.2002
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Narrow band excimer or molecular fluorine laser having an output coupling interferometer
by
KLEINSCHMIDT JUERGEN
,
LOKAI PETER
Year of Publication
03.10.2002
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Narrow band excimer or molecular fluorine laser having an output coupling interferometer
by
Lokai
,
Peter
,
Kleinschmidt, Juergen
Year of Publication
05.09.2002
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Narrow band excimer or molecular fluorine laser having an output coupling interferometer
by
KLEINSCHMIDT JUERGEN
,
LOKAI PETER
Year of Publication
05.09.2002
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Narrow band excimer or molecular fluorine laser having an output coupling interferometer
by
Kleinschmidt, Juergen
,
Lokai
,
Peter
Year of Publication
16.07.2002
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Narrow band excimer or molecular fluorine laser having an output coupling interferometer
by
KLEINSCHMIDT JUERGEN
,
LOKAI PETER
Year of Publication
16.07.2002
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Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp
by
LOKAI PETER
,
SCHROEDER THOMAS
Year of Publication
10.01.2002
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Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp
by
Lokai
,
Peter
,
Schroeder, Thomas
Year of Publication
10.01.2002
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Tunable source of narrowband coherent radiation
by
STAMM; UWE
,
LOKAI
;
PETER
Year of Publication
23.09.1997
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