Sub-10 cm(3) interferometric accelerometer with nano-g resolution
Loh, N C, Schmidt, M A, Manalis, S R
Published in Journal of microelectromechanical systems (01.06.2002)
Published in Journal of microelectromechanical systems (01.06.2002)
Get full text
Journal Article
Sub-10 cm3 interferometric accelerometer with nano-g resolution
LOH, Nin C, SCHMIDT, Martin A, MANALIS, Scott R
Published in Journal of microelectromechanical systems (01.06.2002)
Published in Journal of microelectromechanical systems (01.06.2002)
Get full text
Journal Article
Sub-10 cm super(3) interferometric accelerometer with nano-g resolution
Loh, N C, Schmidt, MA, Manalis, SR
Published in Journal of microelectromechanical systems (01.06.2002)
Published in Journal of microelectromechanical systems (01.06.2002)
Get full text
Journal Article