Design and Control of a Dual-Probe Atomic Force Microscope
Loganathan, Muthukumaran, Al-Ogaidi, Ayad, Bristow, Douglas A.
Published in IEEE/ASME transactions on mechatronics (01.02.2018)
Published in IEEE/ASME transactions on mechatronics (01.02.2018)
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Journal Article
Quasi-repetitive control for fast and accurate atomic force microscopy
Loganathan, Muthukumaran, Bristow, Douglas A.
Published in 2016 American Control Conference (ACC) (01.07.2016)
Published in 2016 American Control Conference (ACC) (01.07.2016)
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Conference Proceeding
Journal Article
METHOD AND APPARATUS FOR LITHOGRAPHIC IMAGING
BURBANK, Daniel, WIHBEY III, Joseph, EVANS, Brandon, HARLALKA, Akshay, SLOAN, Eric, LOGANATHAN, Muthukumaran, DEL PUERTO, Santiago E, CHILLARA, Venkata, CHANG, Bill
Year of Publication 29.06.2023
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Year of Publication 29.06.2023
Patent