Capacitive micromachined ultrasound transducer fabricated with epitaxial silicon membrane
SMITH LOWELL SCOTT, LOGAN JOHN ROBERT, MILLS DAVID MARTIN, TIAN WEING, FORTIN JEFFREY BERNARD
Year of Publication 09.06.2009
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Year of Publication 09.06.2009
Patent
CAPACITIVE MICROMACHINED ULTRASOUND TRANSDUCER FABRICATED WITH EPITAXIAL SILICON MEMBRANE
SMITH LOWELL SCOTT, LOGAN JOHN ROBERT, MILLS DAVID MARTIN, TIAN WEING, FORTIN JEFFREY BERNARD
Year of Publication 13.07.2006
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Year of Publication 13.07.2006
Patent
Capacitive micromachined ultrasound transducer fabricated with epitaxial silicon membrane
SMITH LOWELL SCOTT, LOGAN JOHN ROBERT, MILLS DAVID MARTIN, TIAN WEING, FORTIN JEFFREY BERNARD
Year of Publication 02.05.2006
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Year of Publication 02.05.2006
Patent