Etch and Wet Clean Challenges and Joint Optimization
Yen, Bi-Ming, Lin, Johnny, Lee, Chris, Hegarty, Mike, Loewenhardt, Peter
Published in ECS transactions (01.01.2011)
Published in ECS transactions (01.01.2011)
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Journal Article
TOROIDAL PLASMA SOURCE FOR PLASMA PROCESSING
LOEWENHARDT PETER, LANE CHRISTOPER T, COX MICHAEL S, WANAMAKER DAVID P, PARKS JOHN, LAI CANFENG, MAJEWSKI ROBERT B, SHAMOUILIAN SHAMOUIL
Year of Publication 15.01.2002
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Year of Publication 15.01.2002
Patent