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Year of Publication 05.09.2018
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Year of Publication 09.03.2016
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Year of Publication 25.11.2011
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Year of Publication 25.11.2011
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EUV EUV EXPOSURE APPARATUS
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Year of Publication 29.08.2013
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Year of Publication 29.08.2013
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STOP, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS
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Year of Publication 25.10.2023
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Year of Publication 25.10.2023
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STOP, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS
GRUNER, Toralf, MODESTE, Benjahman Julius, GOLDE, Daniel, ZWEERING, Ralf, LOERING, Ulrich, XALTER, Stefan
Year of Publication 25.10.2023
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Year of Publication 25.10.2023
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OPTICAL SYSTEM WITH AN EXCHANGEABLE, MANIPULABLE CORRECTION ARRANGEMENT FOR REDUCING IMAGE ABERATIONS
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Year of Publication 09.09.2009
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Year of Publication 09.09.2009
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STOP, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS
GRUNER, Toralf, MODESTE, Benjahman Julius, GOLDE, Daniel, ZWEERING, Ralf, LOERING, Ulrich, XALTER, Stefan
Year of Publication 11.05.2022
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Year of Publication 11.05.2022
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STOP, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS
Loering, Ulrich, Golde, Daniel, Modeste, Benjahman Julius, Xalter, Stefan, Gruner, Toralf, Zweering, Ralf
Year of Publication 07.04.2022
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Year of Publication 07.04.2022
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STOP, OPTICAL SYSTEM AND LITHOGRAPHY APPARATUS
GRUNER, Toralf, MODESTE, Benjahman Julius, GOLDE, Daniel, ZWEERING, Ralf, LOERING, Ulrich, XALTER, Stefan
Year of Publication 07.01.2021
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Year of Publication 07.01.2021
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LITHOGRAPHY PROJECTION OBJECTIVE, AND A METHOD FOR CORRECTING IMAGE DEFECTS OF THE SAME
Loering, Ulrich, Wabra, Norbert, Blahnik, Vladan, Ulrich, Wilhelm, Kraehmer, Daniel
Year of Publication 07.03.2019
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Year of Publication 07.03.2019
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Lithography projection objective, and a method for correcting image defects of the same
Loering, Ulrich, Wabra, Norbert, Blahnik, Vladan, Ulrich, Wilhelm, Kraehmer, Daniel
Year of Publication 08.05.2018
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Year of Publication 08.05.2018
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