Search Results - "LIU WEN DAR" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Selective Wet Etching in Fabricating SiGe and Ge Nanowires for Gate-all-Around MOSFETs

Selective Wet Etching in Fabricating SiGe and Ge Nanowires for Gate-all-Around MOSFETs

by Holsteyns, Frank, Yoshida, Yukifumi, Liu, Wen Dar, Sekiguchi, Ryo, Sebaai, Farid, Lee, Yi Chia, Komori, Kana, Wostyn, Kurt
Published in Solid state phenomena (01.08.2018)

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Journal Article

SiGe vs. Si Selective Wet Etching for Si Gate-all-Around

SiGe vs. Si Selective Wet Etching for Si Gate-all-Around

by Rip, Jens, Hikavyy, Andriy, Wostyn, Kurt, Sebaai, Farid, Holsteyns, Frank, Yoshida, Yukifumi, Liu, Wen Dar, Sekiguchi, Ryo, Horiguchi, Naoto, Komori, Kana, Lee, Yi Chia, Mertens, Hans
Published in Solid state phenomena (01.08.2018)

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Journal Article

ETCHING SOLUTION FOR SELECTIVELY REMOVING SILICON NITRIDE DURING MANUFACTURE OF SEMICONDUCTOR DEVICE

ETCHING SOLUTION FOR SELECTIVELY REMOVING SILICON NITRIDE DURING MANUFACTURE OF SEMICONDUCTOR DEVICE

by LEE YIIA, LIU WEN DAR
Year of Publication 09.09.2021

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Patent

ETCHING SOLUTION FOR SELECTIVELY REMOVING SILICON-GERMANIUM ALLOY FROM SILICON-GERMANIUM/GERMANIUM STACK DURING MANUFACTURE OF SEMICONDUCTOR DEVICE

ETCHING SOLUTION FOR SELECTIVELY REMOVING SILICON-GERMANIUM ALLOY FROM SILICON-GERMANIUM/GERMANIUM STACK DURING MANUFACTURE OF SEMICONDUCTOR DEVICE

by LEE YIIA, LIU WEN DAR
Year of Publication 26.09.2019

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Patent

ETCHING SOLUTION FOR SELECTIVELY REMOVING SILICON NITRIDE DURING MANUFACTURE OF SEMICONDUCTOR DEVICE

ETCHING SOLUTION FOR SELECTIVELY REMOVING SILICON NITRIDE DURING MANUFACTURE OF SEMICONDUCTOR DEVICE

by LEE YIIA, LIU WEN DAR
Year of Publication 27.12.2018

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Patent

반도체 디바이스의 제조 동안 규소-게르마늄/규소 스택으로부터 규소-게르마늄 합금을 선택적으로 제거하기 위한 에칭 용액

반도체 디바이스의 제조 동안 규소-게르마늄/규소 스택으로부터 규소-게르마늄 합금을 선택적으로 제거하기 위한 에칭 용액

by WU AIPING, LEE YI CHIA, LIU WEN DAR
Year of Publication 25.01.2024

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Patent

ETCHING COMPOSITION AND ETCHING METHOD FOR SELECTIVELY REMOVING SILICON NITRIDE DURING SEMICONDUCTOR DEVICE FABRICATION

ETCHING COMPOSITION AND ETCHING METHOD FOR SELECTIVELY REMOVING SILICON NITRIDE DURING SEMICONDUCTOR DEVICE FABRICATION

by LEE YIIA, WU AIPING, SUN LAISHENG, LIU WEN DAR, GE JHIH KUEI
Year of Publication 05.12.2023

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Patent

ETCHING SOLUTION FOR TUNGSTEN WORD LINE RECESS

ETCHING SOLUTION FOR TUNGSTEN WORD LINE RECESS

by LEE YIIA, LIU WEN DAR, GE JHIH KUEI
Year of Publication 06.01.2022

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Patent

산화하프늄 부식 억제제

산화하프늄 부식 억제제

by LEE YI CHIA, LIU WEN DAR
Year of Publication 10.09.2021

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Patent

질화티탄 및 몰리브덴 전도성 금속 라인용 에칭액

질화티탄 및 몰리브덴 전도성 금속 라인용 에칭액

by LEE YI CHIA, CHEN CHAO HSIANG, LIU WEN DAR, GE JHIH KUEI
Year of Publication 01.11.2022

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Patent

CO/CU 선택적 습식 에칭제

CO/CU 선택적 습식 에칭제

by LEE YI CHIA, LIU WEN DAR, CHANG CHUNG YI
Year of Publication 25.08.2022

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Patent

건식 에칭 후 포토레지스트 및 금속 함유 잔여물 제거 배합물

건식 에칭 후 포토레지스트 및 금속 함유 잔여물 제거 배합물

by WU AIPING, LEE YI CHIA, LIU WEN DAR, GE JHIH KUEI, CHANG CHUNG YI
Year of Publication 30.05.2024

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Patent

EUV 마스크 보호 구조물을 위한 에칭 조성물 및 방법

EUV 마스크 보호 구조물을 위한 에칭 조성물 및 방법

by LEE YI CHIA, CHEN CHAO HSIANG, LIU WEN DAR, CHANG CHUNG YI
Year of Publication 21.06.2022

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Patent

ETCHING SOLUTION HAVING SILICON OXIDE CORROSION INHIBITOR AND METHOD OF USING THE SAME

ETCHING SOLUTION HAVING SILICON OXIDE CORROSION INHIBITOR AND METHOD OF USING THE SAME

by LEE YIIA, CHANG CHUNG-YI, LIU WEN DAR
Year of Publication 04.06.2020

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Patent

반도체 소자의 제조 중 질화규소를 선택적으로 제거하기 위한 에칭 용액 및 방법

반도체 소자의 제조 중 질화규소를 선택적으로 제거하기 위한 에칭 용액 및 방법

by LEE YI CHIA, LIU WEN DAR, GE JHIH KUEI
Year of Publication 20.10.2021

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Patent

ETCHING SOLUTION FOR TUNGSTEN WORD LINE RECESS

ETCHING SOLUTION FOR TUNGSTEN WORD LINE RECESS

by LEE YIIA, LIU WEN DAR, GE JHIH KUEI
Year of Publication 26.09.2019

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Patent

반도체 소자의 제조 중 질화규소를 선택적으로 제거하기 위한 에칭 조성물 및 방법

반도체 소자의 제조 중 질화규소를 선택적으로 제거하기 위한 에칭 조성물 및 방법

by WU AIPING, LEE YI CHIA, SUN LAISHENG, LIU WEN DAR, GE JHIH KUEI
Year of Publication 03.06.2022

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Patent

ETCHING SOLUTION FOR SELECTIVELY REMOVING SILICON-GERMANIUM ALLOY FROM A SILICON-GERMANIUM/ GERMANIUM STACK DURING MANUFACTURE OF A SEMICONDUCTOR DEVICE

ETCHING SOLUTION FOR SELECTIVELY REMOVING SILICON-GERMANIUM ALLOY FROM A SILICON-GERMANIUM/ GERMANIUM STACK DURING MANUFACTURE OF A SEMICONDUCTOR DEVICE

by LEE YI CHIA, LIU WEN DAR
Year of Publication 18.09.2019

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Patent

ETCHING SOLUTION FOR SELECTIVELY REMOVING TANTALUM NITRIDE OVER TITANIUM NITRIDE DURING MANUFACTURE OF SEMICONDUCTOR DEVICE

ETCHING SOLUTION FOR SELECTIVELY REMOVING TANTALUM NITRIDE OVER TITANIUM NITRIDE DURING MANUFACTURE OF SEMICONDUCTOR DEVICE

by LEE YI CHIA, LIU WEN DAR
Year of Publication 16.05.2019

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Patent

ETCHING SOLUTION FOR SELECTIVELY REMOVING TANTALUM NITRIDE OVER TITANIUM NITRIDE DURING MANUFACTURE OF A SEMICONDUCTOR DEVICE

ETCHING SOLUTION FOR SELECTIVELY REMOVING TANTALUM NITRIDE OVER TITANIUM NITRIDE DURING MANUFACTURE OF A SEMICONDUCTOR DEVICE

by LEE YI CHIA, LIU WEN DAR
Year of Publication 06.03.2019

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Patent

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