INSPECTION TOOL FOR A SEMICONDUCTOR PROCESSING TOOL AND METHODS OF USE
LAI CHENG HAO, CHIEN SHANG CHIEH, CHEN LI JUI, TSAI MING HSUN, LIU HENG HSIN
Year of Publication 26.12.2022
Get full text
Year of Publication 26.12.2022
Patent
3D EUV EUV LITHOGRAPHY SYSTEM WITH 3D SENSING AND TUNING MODULES
CHEN TAI YU, CHIEN SHANG CHIEH, YU SHENG KANG, CHEN LI JUI, PAN TZU JUNG, CHEN KUAN HUNG, LIU HENG HSIN
Year of Publication 14.09.2023
Get full text
Year of Publication 14.09.2023
Patent
SYSTEM AND METHOD FOR PERFORMING EXTREME ULTRAVIOLET PHOTOLITHOGRAPHY PROCESSES
LIU KUO AN, CHEN TAI YU, CHIEN SHANG CHIEH, LAM KAI TAK, WU CHUNG WEI, CHEN LI JUI, WU ZHIQIANG, KHIVSARA SAGAR DEEPAK, CHANG GWAN SIN, LIU HENG HSIN, HSIEH CHIEH
Year of Publication 14.09.2023
Get full text
Year of Publication 14.09.2023
Patent
SYSTEM AND METHOD FOR OMNIDIRECTIONAL REAL TIME DETECTION OF PHOTOLITHOGRAPHY CHARACTERISTICS
CHEN TAI YU, CHIEN SHANG CHIEH, YU SHENG KANG, CHEN LI JUI, LIU HENG HSIN
Year of Publication 26.08.2022
Get full text
Year of Publication 26.08.2022
Patent
Design for control: Temperature uniformity in rapid thermal processor
Huang, Ian, Liu, Hsin-Heng, Yu, Cheng-Ching
Published in The Korean journal of chemical engineering (01.01.2000)
Published in The Korean journal of chemical engineering (01.01.2000)
Get full text
Journal Article
ENHANCED SCANNER THROUGHPUT SYSTEM AND METHOD
LIN CHIN HSIANG, LEE HENG JEN, LIU YU MEI, LIN CHIH WEI, HUANG I HSIUNG, LIU HENG HSIN
Year of Publication 27.11.2013
Get full text
Year of Publication 27.11.2013
Patent
Automated spawning and fertilization system to obtain alevins of Pacú (Piaractus mesopotamicus) in Paraguay
Romero, Rodrigo, Ríos, Viviana, Rodríguez, María Inés, Vargas, Miguel, Insaurralde, Mario, Barrios, Carmen, Liu, Heng-hsin, Jiunn-Shyan, Jou, Jyh-Nian, Pai, Castillo, Martin
Published in Compendio de ciencias veterinarias (En línea) (30.06.2022)
Published in Compendio de ciencias veterinarias (En línea) (30.06.2022)
Get full text
Journal Article
Sistema automatizado de desove y fertilización para la obtención de alevines de Pacú (Piaractus mesopotamicus) en Paraguay
Rodrigo, Romero, Viviana, Ríos, María Inés, Rodríguez, Miguel, Vargas, Mario, Insaurralde, Carmen, Barrios, Heng-hsin, Liu, Jou, Jiunn-Shyan, Pai, Jyh-Nian, Martin, Castillo
Published in Compendio de ciencias veterinarias (En línea) (01.06.2022)
Published in Compendio de ciencias veterinarias (En línea) (01.06.2022)
Get full text
Journal Article
EUV LIGHT SOURCE CONTAMINATION MONITORING SYSTEM
TSAI, Cheng Hung, Chen, Li-Jui, Chien, Shang-Chieh, Yu, Sheng-Kang, Liu, Heng-Hsin
Year of Publication 17.10.2024
Get full text
Year of Publication 17.10.2024
Patent
EUV lithography apparatus
Chen, Li-Jui, Chien, Shang-Chieh, Tsai, Cheng Hung, Yu, Sheng-Kang, Liu, Heng-Hsin
Year of Publication 15.10.2024
Get full text
Year of Publication 15.10.2024
Patent
Apparatus and method for generating extreme ultraviolet radiation
Chen, Yu-Huan, Tsai, Ming-Hsun, Huang, Yu-Chih, Chien, Shang-Chieh, Liu, Heng-Hsin
Year of Publication 08.10.2024
Get full text
Year of Publication 08.10.2024
Patent