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Year of Publication 19.09.2024
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METHODS FOR UPPER PLATEN MANUFACTURING
GURUSAMY, Jay, XUE, Ximeng, OH, Jeonghoon, LISCHKA, David J, RANGARAJAN, Jagan, ZUNIGA, Steven M
Year of Publication 19.09.2024
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Year of Publication 19.09.2024
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Year of Publication 02.05.2024
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CONTROL OF CARRIER HEAD SWEEP AND PLATEN SHAPE
Oh, Jeonghoon, Lischka, David J, Lee, Christopher Heung-Gyun, Gurusamy, Jay, Zuniga, Steven M, Cheung, Ghunbong, Zhang, Huanbo, Mikhaylichenko, Ekaterina A
Year of Publication 02.05.2024
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Year of Publication 02.05.2024
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POLISHING HEAD WITH LOCAL INNER RING DOWNFORCE CONTROL
Oh, Jeonghoon, Lischka, David J, Brown, Brian J, Gurusamy, Jay, Zuniga, Steven M, Zhang, Huanbo, Lau, Eric L, Mikhaylichenko, Ekaterina A, Nagengast, Andrew
Year of Publication 09.11.2023
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Year of Publication 09.11.2023
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POLISHING HEAD WITH LOCAL INNER RING DOWNFORCE CONTROL
NAGENGAST, Andrew, LAU, Eric L, GURUSAMY, Jay, OH, Jeonghoon, BROWN, Brian J, LISCHKA, David J, MIKHAYLICHENKO, Ekaterina A, ZUNIGA, Steven M, ZHANG, Huanbo
Year of Publication 09.11.2023
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Year of Publication 09.11.2023
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