Pull-in study of an electrostatic torsion microactuator
Degani, O., Socher, E., Lipson, A., Lejtner, T., Setter, D.J., Kaldor, S., Nemirovsky, Y.
Published in Journal of microelectromechanical systems (01.12.1998)
Published in Journal of microelectromechanical systems (01.12.1998)
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