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TiN Metal Hard Mask Removal with Selectivity to Tungsten and TiN Liner
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COMPOSITION AND PROCESS FOR SELECTIVELY ETCHING METAL NITRIDES
ZHANG PENG, LIPPY STEVEN, CHEN TIANNIU, THOMAS NICOLE E, BARNES JEFFREY A, COOPER EMANUEL I
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Year of Publication 20.12.2013
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COMPOSITIONS AND METHODS FOR SELECTIVELY ETCHING TITANIUM NITRIDE
TU SHENG HUNG, LIPPY STEVEN, CHEN LI MIN, RAJARAM REKHA, BARNES JEFFREY A, COOPER EMANUEL I
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Year of Publication 18.11.2014
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