GAS DIFFUSER UNIT, PROCESS CHAMBER AND WAFER PROCESSING METHOD
LIOU JOUNG-WEI, CHEN FEI-FAN, HUANG CHIEN KUO, SHEN CHIA-I, HUANG SHIH-WEN
Year of Publication 01.01.2015
Get full text
Year of Publication 01.01.2015
Patent
Method for forming semiconductor device structure
LIOU JOUNG-WEI, HSU KUANG-YUAN, KO CHUNGI, SUN CHIH-HUNG, CHOU CHIANG, SHIH PONG, LEE TZE-LIANG
Year of Publication 12.01.2016
Get full text
Year of Publication 12.01.2016
Patent
Surface treatment in the formation of interconnect structure
LIOU JOUNG-WEI, JENG SHWANG-MING, YANG HUIUN, CHEN MEI-LING, CHOU CHIANG, SHIH PONG
Year of Publication 04.11.2014
Get full text
Year of Publication 04.11.2014
Patent
METHOD FOR FORMING SEMICONDUCTOR DEVICE STRUCTURE
LIOU JOUNG-WEI, HSU KUANG-YUAN, KO CHUNGI, SUN CHIH-HUNG, CHOU CHIANG, SHIH PONG, LEE TZE-LIANG
Year of Publication 16.07.2015
Get full text
Year of Publication 16.07.2015
Patent
Surface Treatment in the Formation of Interconnect Structure
LIOU JOUNG-WEI, JENG SHWANG-MING, YANG HUIUN, CHEN MEI-LING, CHOU CHIANG, SHIH PONG
Year of Publication 22.05.2014
Get full text
Year of Publication 22.05.2014
Patent
Method of and apparatus for active energy assist baking
LIOU JOUNG-WEI, JENG SHWANG-MING, KO CHUNGI, CHEN MEI-LING, LIN KENGU, CHOU CHIA CHENG
Year of Publication 14.04.2015
Get full text
Year of Publication 14.04.2015
Patent