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Year of Publication 16.04.2024
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Year of Publication 26.10.2021
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Year of Publication 07.06.2023
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Year of Publication 23.06.2022
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CERAMIC SHOWERHEAD WITH EMBEDDED RF ELECTRODE FOR CAPACITIVELY COUPLED PLASMA REACTOR
KEIL DOUGLAS L, MOHAMED SABRI, AUGUSTYNIAK EDWARD, LINGAMPALLI RAMKISHAN RAO, LEESER KARL, BARNETT CODY
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Year of Publication 21.06.2022
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CERAMIC SHOWERHEAD WITH EMBEDDED RF ELECTRODE FOR CAPACITIVELY COUPLED PLASMA REACTOR
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Year of Publication 04.03.2021
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열 확산기를 갖는 고온 기판 지지부
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Year of Publication 21.10.2022
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Year of Publication 21.10.2022
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CERAMIC SHOWERHEAD WITH EMBEDDED RF ELECTRODE FOR CAPACITIVELY COUPLED PLASMA REACTOR
KEIL DOUGLAS L, MOHAMED SABRI, AUGUSTYNIAK EDWARD, LINGAMPALLI RAMKISHAN RAO, LEESER KARL, BARNETT CODY
Year of Publication 05.09.2014
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Year of Publication 05.09.2014
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SYSTEM AND APPARATUS FOR FLOWABLE DEPOSITION IN SEMICONDUCTOR FABRICATION
MOHN JONATHAN D, TE NIJENHUIS HARALD, LINGAMPALLI RAMKISHAN RAO, MADRIGAL KEVIN, HAMILTON SHAWN M
Year of Publication 28.06.2012
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Year of Publication 28.06.2012
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