Spatially tunable deposition to compensate within wafer differential bow
Linebarger, Jr., Nick Ray, Yin, Xin, Shaikh, Fayaz A, Mudrow, Matthew, Williams, Brian Joseph, Lee, James F, Vintila, Adriana
Year of Publication 02.04.2024
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Year of Publication 02.04.2024
Patent
CARRIER RING TO PEDESTAL KINEMATIC MOUNT FOR SUBSTRATE PROCESSING TOOLS
MADSEN, Eric, NIMMALA, Seshu, LINEBARGER, Jr., Nick Ray, BRUENING, Rigel Martin
Year of Publication 29.12.2022
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Year of Publication 29.12.2022
Patent
GAS DISTRIBUTION PORT INSERT AND APPARATUS INCLUDING THE SAME
LEONARD, Callan Patrick, HUANG, Yanhui, SHAIKH, Fayaz A, LUO, Bin, LINEBARGER Jr., Nick Ray, WANG, Ruisong, MAK, Joshua Nathaniel Eric, BEAUDETTE, Chad Adrien, BOATRIGHT, Daniel, LEE, James Forest
Year of Publication 28.03.2024
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Year of Publication 28.03.2024
Patent
SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIAL BOW
Linebarger, Jr., Nick Ray, Yin, Xin, Shaikh, Fayaz A, Mudrow, Matthew, Williams, Brian Joseph, Lee, James F, Vintila, Adriana
Year of Publication 22.09.2022
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Year of Publication 22.09.2022
Patent
Asymmetric wafer bow compensation by chemical vapor deposition
Linebarger, Jr., Nick Ray, Shaikh, Fayaz A, Liu, Chanyuan, Rana, Niraj
Year of Publication 26.01.2021
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Year of Publication 26.01.2021
Patent
Controlling showerhead heating via resistive thermal measurements
Linebarger, Jr., Nick Ray, Pelkey, Devon, Bailey, Curtis W, Srinivasan, Easwar
Year of Publication 22.12.2020
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Year of Publication 22.12.2020
Patent
SPATIALLY TUNABLE DEPOSITION TO COMPENSATE WITHIN WAFER DIFFERENTIAL BOW
SHAIKH, Fayaz A, VINTILA, Adriana, LEE, James F, MUDROW, Matthew, WILLIAMS, Brian Joseph, LINEBARGER, Nick Ray Jr, YIN, Xin
Year of Publication 25.02.2021
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Year of Publication 25.02.2021
Patent
Controlling showerhead heating by resistive thermal measurement
SRINIVASAN, ISHWAR, PELKEY DEVON, BAILEY CURTIS W, NICK RAY LINEBARGER JR
Year of Publication 08.03.2024
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Year of Publication 08.03.2024
Patent
Carrier ring structure and chamber systems including the same
Linebarger, Jr., Nick Ray, Hollister, Alice, Methaapanon, Rungthiwa, Jeon, Eli, Reddy, Sirish
Year of Publication 26.03.2019
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Year of Publication 26.03.2019
Patent