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RECTANGULAR CAPACITORS FOR DYNAMIC RANDOM ACCESS MEMORY (DRAM) AND DUAL- PASS LITHOGRAPHY METHODS TO FORM THE SAME (DRAM)
by
LINDERT
,
Nick N
Year of Publication
16.05.2014
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METHODS TO FORM MEMORY DEVICES HAVING A CAPACITOR WITH A RECESSED ELECTRODE
by
LINDERT
,
NICK N
,
GLASSMAN, TIMOTHY, E. TE
,
STEIGERWALD, JOSEPH, M. JM
,
JEZEWSKI, CHRISTOPHER, J. CJ
,
KEATING, STEVEN, J. SJ
Year of Publication
11.01.2013
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electricity
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esp@cenet
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