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LEE, VICTOR, YEE-WAY, MAGBITANG, TEDDIE, PEREGRINO, DUBOIS, GERAUD, JEAN-MICHEL, KIM, HOOL, MILLER, ROBERT, DENNIS, VOLKSEN, WILLI, HEDRICK, JAMES, LUPTON, SANKARAPANDIAN, MUTHUMANICKAM, SUNDBERG, LINDA, KARIN
Year of Publication 28.06.2007
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Year of Publication 28.06.2007
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LOW-K INTERLEVEL DIELECTRIC MATERIALS AND METHOD OF FORMING LOW-K INTERLEVEL DIELECTRIC LAYERS AND STRUCTURES
LEE, VICTOR, YEE-WAY, MAGBITANG, TEDDIE, PEREGRINO, DUBOIS, GERAUD, JEAN-MICHEL, KIM, HOOL, MILLER, ROBERT, DENNIS, VOLKSEN, WILLI, HEDRICK, JAMES, LUPTON, SANKARAPANDIAN, MUTHUMANICKAM, SUNDBERG, LINDA, KARIN
Year of Publication 08.02.2007
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Year of Publication 08.02.2007
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Verfahren zur gezielten Selbstorganisation mit Immersionslithographie bei 193 NM und daraus gebildete Schichtstrukturen
ITO, HIROSHI, CHENG, JOY, SANDERS, DANIEL PAUL, KIM, HOOL, WALLRAFF, GREGORY MICHAEL, SUNDBERG, LINDA KARIN, NA, YOUNG-HYE, TRUONG, HOA, HINSBERG, WILLIAM
Year of Publication 27.09.2012
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Year of Publication 27.09.2012
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Methods of directed self-assembly with 193nm immersion lithography and layered structures formed therefrom
WALLRAFF GREGORY MICHAEL, SUNDBERG LINDA KARIN, ITO HIROSHI, SANDERS DANIEL PAUL, NA YOUNG-HYE, KIM HOOL, TRUONG HOA, HINSBERG WILLIAM, CHENG JOY
Year of Publication 05.09.2012
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Year of Publication 05.09.2012
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Immersion topcoat materials with improved performance
SUNDBERG LINDA KARIN, WALLRAFF GREGORY MICHAEL, BROCK PHILLIP JOE, GIL DARIO, LARSON CARL ERIC, ALLEN ROBERT DAVID, HINSBERG WILLIAM DINAN
Year of Publication 03.11.2010
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Year of Publication 03.11.2010
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Water castable - water strippable top coats for 193 nm immersion lithography
WALLRAFF GREGORY, SUNDBERG LINDA KARIN, CHA JENNIFER, BROCK PHILIP JOE, GIL DARIO, LARSON CARL ERIC
Year of Publication 05.11.2008
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Year of Publication 05.11.2008
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Immersion topcoat materials with improved performance
SUNDBERG LINDA KARIN, WALLRAFF GREGORY MICHAEL, BROCK PHILLIP JOE, GIL DARIO, LARSON CARL ERIC, ALLEN ROBERT DAVID, HINSBERG WILLIAM DINAN
Year of Publication 16.04.2008
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Year of Publication 16.04.2008
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Immersion topcoat materials with improved performance
ALLEN, ROBERT DAVID, GIL, DARIO, WALLRAFF, GREGORY MICHAEL, SUNDBERG, LINDA KARIN, BROCK, PHILLIP JOE, LARSON, CARL ERIC, HINSBERG, WILLIAM DINAN
Year of Publication 16.12.2006
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Year of Publication 16.12.2006
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